Semiconductor device manufacturing method and semiconductor device
A semiconductor device manufacturing method includes exciting plasma, applying RF power onto a target substrate to generate substrate bias and performing an ion implantation plural times by applying the RF power in the form of pulses.
1. A semiconductor device manufacturing method comprising:
exciting plasma;
applying RF power onto a target substrate to generate substrate bias and electrically grounding a ground plate with respect to a frequency of the RF power to suppress an increase of a plasma potential, the ground plate being disposed above the target substrate so as to face the target substrate; and
performing an ion implantation plural times by applying the RF power in the form of pulses.
2. The semiconductor device manufacturing method of claim 1 , wherein an interval between the pulses is set to be larger than the product of a reciprocal of a ratio of a number of electrons to the total number of ion electric charges in the plasma for a unit volume, a coefficient of secondary electrons emitted from the target substrate and a width of a pulse.
3. The semiconductor device manufacturing method of claim 1 , wherein the plasma is excited by a plasma excitation gas which is a fluoride gas of atom ions to be implanted or a mixed gas made by diluting the fluoride gas of the atom ions to be implanted with a rare gas.
4. The semiconductor device manufacturing method of claim 3 , wherein the target substrate includes silicon and the target substrate is cooled to a temperature lower than a volatilization temperature of a silicon fluoride under a pressure of the processing chamber.
5. The semiconductor device manufacturing method of claim 1 , wherein the plasma is excited by a plasma excitation gas which is a gas selected from BF 3 , PF 3 and AsF 3 or a mixed gas made by diluting a gas selected from BF 3 , PF 3 and AsF 3 with at least one kind of rare gas selected from Ar, Kr and Xe.