Nitride semiconductor device
The present invention relates to a nitride semiconductor device One aspect of the present invention provides a nitride semiconductor device including: a nitride semiconductor layer having a 2DEG channel; a source electrode in ohmic contact with the nitride semiconductor layer; a drain electrode in ohmic contact with the nitride semiconductor layer; a p-type nitride layer formed on the nitride semiconductor layer between the source and drain electrodes; an n-type nitride layer formed on the p-type nitride layer; and a gate electrode formed between the source and drain electrodes to be close to the source electrode and in contact with the n-type nitride layer so that a source-side sidewall thereof is aligned with source-side sidewalls of the p-type and n-type nitride layers.
1. A nitride semiconductor device comprising:
a nitride semiconductor layer formed by a heterojunction of a first nitride layer and a second nitride layer, which includes a material with a wider energy band gap than a material of the first nitride layer, and having a two-dimensional electron gas (2DEG) channel formed near a junction interface;
a source electrode in ohmic contact with the nitride semiconductor layer;
a drain electrode in ohmic contact with the nitride semiconductor layer while being spaced apart from the source electrode;
a p-type nitride layer formed on the nitride semiconductor layer between the source and drain electrodes to be spaced apart from the respective source and drain electrodes;
an n-type nitride layer formed on the p-type nitride layer; and
a gate electrode formed between the source and drain electrodes to be close to the source electrode and in contact with the n-type nitride layer so that a source-side sidewall thereof is aligned with source-side sidewalls of the p-type and n-type nitride layers.
2. The nitride semiconductor device according to claim wherein the gate electrode is in ohmic contact with the n-type nitride layer.
3. The nitride semiconductor device according to claim 2 , wherein the source, drain, and gate electrodes are made of the same metal material.
4. The nitride semiconductor device according to claim 1 , wherein the p-type nitride layer extends to a drain side beyond the range of a drain-side sidewall of the gate electrode.
5. The nitride semiconductor device according to claim 1 , wherein the source-side sidewall of the gate electrode is aligned to coincide with the source-side sidewalls of the p-type and n-type nitride layers or not to reach the source-side sidewalls of the p-type and n-type nitride layers.
6. The nitride semiconductor device according to claim 1 , wherein the p-type nitride layer is made of a material obtained by doping the material of the first nitride layer as p-type, and the n-type nitride layer is made of a material obtained by doping the material of the first nitride layer as n-type.
7. The nitride semiconductor device according to claim 1 , wherein the material of the first nitride layer is GaN, and the material of the second nitride layer is AIGaN.
8. The nitride semiconductor device according to claim 7 , wherein the p-type nitride layer is made of p-GaN, and the n-type nitride layer is made of n-GaN.
9. The nitride semiconductor device according to claim 1 , wherein the nitride semiconductor layer is formed on a buffer layer which is formed on a substrate.