IP Library Granted Patent US 8,723,135
Granted Patent B2
US 8,723,135 · App. 13/438,424 · Granted May 13, 2014

Ion beam bending magnet for a ribbon-shaped ion beam

Inventors: Hilton Frank Glavish (Incline Village, NV); Shojiro Dohi (Koka, JP); Benjamin Thomas King (Lower Hutt, NZ)
Assignee: Nissin Ion Equipment Co., Ltd.
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Quick Facts
Patent No.
US 8,723,135
App. No.
13/438,424
Granted
May 13, 2014
Kind
B2
Abstract

An ion beam bending magnet provides a curved path through the magnet for bending a ribbon-shaped ion beam having its major cross-sectional dimension normal to the bending plane of the magnet. The magnet comprises a ferromagnetic yoke surrounding the beam path and having an internal profile in cross-section formed of four angled sides. These sides are angled to the major dimension of the ribbon beam passing through the magnet, so that the internal profile of the yoke is relatively wide in the center of the ribbon beam and relatively narrow near the top and bottom edges of the ribbon beam. Electrical conductors against the internal surfaces of the yoke provide a uniform distribution of electrical current per unit length along the angled sides of the profile, providing a substantially uniform magnetic bending field within the magnet yoke.

Claims (46)

1. An ion beam bending magnet having an ion beam inlet, an ion beam outlet and a curved path through the magnet for an ion beam, said curved path having a path length between said beam inlet and said beam outlet, said curved path bending monotonically in an ion beam bending plane and having a curved central beam axis, said magnet being adapted to accommodate and bend along said curved beam path, a ribbon-shaped ion beam having a cross-sectional profile with a major dimension normal to said bending plane;

the magnet comprising

a ferromagnetic yoke surrounding said curved beam path along said path length, said ferromagnetic yoke defining a uniform cross-sectional internal profile along said path length in respective planes normal to said curved central beam axis, said uniform cross-sectional internal profile being defined in Cartesian (x,y) co-ordinates having an origin at said central beam axis, an x-axis extending in said ion beam bending plane and a y-axis normal to said bending plane; and

electrical windings associated with said ferromagnetic yoke, arranged to generate a magnetic bending field within said yoke across said curved path to bend a ribbon-shaped beam of ions having a desired mass/charge ratio along said curved path;

wherein said uniform cross-sectional internal profile has sides including four angled sides respectively lying on lines defined by the four equations:

a 1 x+b 1 y=a 1 b 1 ,  1)

a 2 x−b 1 y=a 2 b 1 ,  2)

a 3 x+b 2 y=−a 3 b 2 ,  3)

a 4 x−b 2 y=−a 4 b 2 ;  4)

where a 1 , a 2 , a 3 , a 4 , b 1 and b 2 are positive numbers,

wherein each of said angled sides lying on the lines defined by equations 1) and 4) extends on the respective said line up to y=y′, and each of said angled sides lying on the lines defined by equations 2) and 3) extends on the respective said line down to y=−y″, where both y′ and y″ are positive, y′ is less than or equal to the smaller of a 1 and a 4 , and y″ is less than or equal to the smaller of a 2 and a 3 .

2. An ion beam bending magnet as claimed in claim 1 , wherein

b 2 /a 4 =tan θ 1 ,

b 1 /a 1 =tan θ 2 ,

b 2 /a 3 =tan θ 3 ,

and b 1 /a 2 =tan θ 4 .

and each of θ 1 , θ 2 , θ 3 , and θ 4 is greater than or equal to 20° and less than or equal to 60°.

3. An ion beam bending magnet as claimed in claim 2 , wherein

tan θ 1 /tan θ 3 =tan θ 2 /tan θ 4 .

4. An ion beam bending magnet as claimed in claim 3 , wherein

θ 2 =θ 4 and θ 1 =θ 3 .

5. An ion beam bending magnet as claimed in claim 4 , wherein θ 1 =θ 2 .

6. An ion beam bending magnet as claimed in claim 5 , wherein θ 1 =45°.

7. An ion beam bending magnet as claimed in claim 1 , wherein said uniform cross-sectional internal profile has a top and a bottom in addition to said four angled sides, and said top and bottom are parallel to the x-axis.

8. An ion beam bending magnet as claimed in claim 7 , wherein said top and said bottom have respective lengths c 1 and c 2 , where each of c 1 and c 2 is less than or equal to (b 1 +b 2 )/2.

9. An ion beam bending magnet as claimed in claim 8 , wherein each of c 1 and c 2 is less than or equal to (b 1 +b 2 )/4.

10. An ion beam bending magnet as claimed in claim 1 , wherein said ferromagnetic yoke has four angled internal surfaces which respectively correspond to said four angled sides of said uniform cross-sectional internal profile, and said electrical windings comprise axial conductor elements extending adjacent said yoke angled internal surfaces parallel to said curved central beam axis between said inlet and said outlet of said magnet, said conductor elements being arranged to provide a uniform number of said conductor elements per unit distance along each of said four angled sides of said cross-sectional profile.

11. An ion beam bending magnet as claimed in claim 10 , wherein each of said four sides of said uniform cross-sectional internal profile of said yoke extends between a respective waist end where |x| is maximum and |y| is minimum and a respective apex end where |x| is a minimum and |y| is a maximum, and

wherein said yoke has a cross-sectional thickness normal to the respective angled internal surface which reduces from a maximum at said waist ends of said sides to a minimum at said apex ends of said sides.

12. An ion beam bending magnet as claimed in claim 10 , wherein said electrical windings comprise at least one pair of saddle coil units.

13. An ion beam bending magnet as claimed in claim 12 , wherein each said saddle coil unit comprises

a first plurality of said axial conductor elements arranged side-by-side in a first axial row parallel to a first one of said yoke surfaces which is inside said curved beam path,

a second plurality of said axial conductor elements arranged side-by-side in a second axial row parallel to a second one of said yoke internal surfaces which is outside said curved beam path,

a first plurality of linking conductor elements connecting said axial conductor elements of said first and second axial rows adjacent said inlet of the magnet, and

a second plurality of linking conductor elements connecting said axial conductor elements of said first and second axial rows adjacent said outlet of the magnet.

14. An ion beam bending magnet as claimed in claim 13 , wherein said linking conductor elements of said first plurality are arranged side-by-side in a first radial row lying in a respective first radial plane normal to said central beam axis at said inlet of said magnet, and

said linking conductor elements of said second plurality are arranged side-by-side in a second radial row lying in a respective second radial plane normal to said central beam axis at said outlet of said magnet.

15. An ion beam bending magnet as claimed in claim 14 , wherein each of said axial conductor elements, in each of said first and second axial rows, bends outwards through 90° perpendicularly to the respective adjacent one of said first and second yoke internal surfaces, to connect to a respective one of said linking conductor elements.

16. An ion beam bending magnet as claimed in claim 13 , wherein said electrical windings comprise a plurality of pairs of said saddle coil units, respective said rows of said axial conductors of each of said pairs of saddle coil units extending over respective parts of each of said yoke internal surfaces.

17. An ion beam bending magnet as claimed in claim 16 , wherein the conductor elements of said windings are water-cooled tubular elements, and the saddle coil units of each of said plurality of pairs have a respective number of coil turns selected to equalize a total length of conductor in each of said units.

18. An ion beam bending magnet as claimed in claim 6 , wherein said ferromagnetic yoke has four internal surfaces which respectively correspond to said four sides of said uniform cross-sectional internal profile,

and the magnet further includes;

at least a first set of magnetic quadrupole field windings located between said inlet and said outlet of the magnet and comprising a respective coil loop located against each of said four inner surfaces, and a first energizing supply for said first set of quadrupole field windings.

19. An ion beam bending magnet as claimed in claim 18 , including a second magnetic quadrupole field winding set located in front of said inlet of said magnet, and a second energizing supply for said second quadrupole field winding set operative to apply y-direction focusing to at least edges of a ribbon-shaped ion beam entering said magnet.

20. An ion beam bending magnet as claimed in claim 19 , wherein said first energizing supply is operative to apply y-direction defocusing to said ion beam as said beam travels through said magnet.

21. An ion beam bending magnet as claimed in claim 1 , further including trim coils mounted inside said ferromagnetic yoke, extending adjacent said curved path and energizable to produce a trimming magnetic field at locations along said curved beam path effective to reduce distortion of said cross-sectional profile of said ribbon-shaped ion beam caused by said magnetic bending field.

Assignments (2)
CORRECTIVE ASSIGNMENT TO CORRECT THE STREET ADDRESS OF ASSIGNEE ON NOTICE OF RECORDATION FORM FROM 575, KUZE TONOSHIRO-CHO MINAM1-KU PREVIOUSLY RECORDED ON REEL 028235 FRAME 0026. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT ASSIGNEE ADDRESS TO NISSIN ION EQUIPMENT CO., LTD. 575, KUZE TONOSHIRO-CHO MINAMI-KU KYOTO-SHI, KYOTO, JAPAN 601-8205. Recorded Sep 6, 2012
From: GLAVISH, HILTON FRANK; DOHI, SHOJIRO; KING, BENJAMIN THOMAS
To: NISSIN ION EQUIPMENT CO., LTD.
Reel/Frame 028918/0507 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 18, 2012
From: GLAVISH, HILTON FRANK; DOHI, SHOJIRO; KING, BENJAMIN THOMAS
To: NISSIN ION EQUIPMENT CO., LTD.
Reel/Frame 028235/0026 →
Continuity (1)
Related Publication 20130256552A1 · Oct 3, 2013