IP Library › Granted Patent US 8,729,614
Granted Patent B2
US 8,729,614 · App. 13/115,268 · Granted May 20, 2014

Flexible ferroelectric memory device and manufacturing method for the same

Inventors: Jong-Hyun Ahn (Suwon-si, KR); Jonghyun Rho (Suwon-si, KR)
Assignee: Sungkyunkwan University Foundation for Corporate Collaboration
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Quick Facts
Patent No.
US 8,729,614
App. No.
13/115,268
Granted
May 20, 2014
Kind
B2
Abstract

The present disclosure relates to a flexible nonvolatile ferroelectric memory device, a 1T-1R (1Transistor-1Resistor) flexible ferroelectric memory device, and a manufacturing method for the same.

Claims (26)

1. A transistor-type flexible nonvolatile ferroelectric memory device comprising:

a semiconductor channel layer formed on a flexible substrate;

source/drain regions respectively formed on each side of the semiconductor channel layer;

a polymer adhesive layer formed on the semiconductor channel layer;

a first insulating layer formed on the polymer adhesive layer;

a second insulating layer formed on the first insulating layer;

a ferroelectric layer formed on the second insulating layer;

a gate electrode formed on the ferroelectric layer; and,

source/drain electrodes respectively formed on the source/drain regions.

2. The transistor-type flexible nonvolatile ferroelectric memory device of claim 1 ,

wherein each of the first insulating layer and the second insulating layer includes a material selected from a group consisting of TiO 2 , SrTiO x , ZrO 2 , LiNbO 3 , Al 2 O 3 SiO 2 and a combination thereof.

3. The transistor-type flexible nonvolatile ferroelectric memory device of claim 1 ,

wherein the polymer adhesive layer includes a material selected from a group consisting of epoxy resin, cytop, polyimide, benzocyclobutene, polydimethylsiloxane (PDMS), PMMA (Poly(methylmethacrylate)), polyurethane, polyvinylphenol, and a combination thereof.

4. The transistor-type flexible nonvolatile ferroelectric memory device of claim 1 ,

wherein the ferroelectric layer is formed by a vacuum deposition or a sol-gel method.

5. A transistor-type flexible nonvolatile ferroelectric memory device comprising:

a semiconductor channel layer formed on a flexible substrate;

source/drain regions respectively formed on each side of the semiconductor channel layer;

a barrier layer formed on the semiconductor channel layer;

a ferroelectric layer formed on the barrier layer;

source/drain electrodes respectively formed on the source/drain regions; and

a gate electrode formed on the ferroelectric layer.

6. The transistor-type flexible nonvolatile ferroelectric memory device of claim 5 , wherein the barrier layer is an insulating layer.

7. The transistor-type flexible nonvolatile ferroelectric memory device of claim 6 , wherein the insulating barrier layer includes a material selected from a group consisting of TiO 2 , SrTiO x , ZrO 2 , LiNbO 3 , Al 2 O 3 , SiO 2 and a combination thereof.

8. The transistor-type flexible nonvolatile ferroelectric memory device of claim 5 ,

wherein the ferroelectric layer is formed by a vacuum deposition or a sol-gel method.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 25, 2011
From: AHN, JONG-HYUN; RHO, JONGHYUN
To: SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
Reel/Frame 026338/0006 →
Priority Claims (1)
KR 10-2010-0062280 · Jun 29, 2010 · national
Continuity (1)
Related Publication 20110316059A1 · Dec 29, 2011