Flexible ferroelectric memory device and manufacturing method for the same
View Patent ↗The present disclosure relates to a flexible nonvolatile ferroelectric memory device, a 1T-1R (1Transistor-1Resistor) flexible ferroelectric memory device, and a manufacturing method for the same.
1. A transistor-type flexible nonvolatile ferroelectric memory device comprising:
a semiconductor channel layer formed on a flexible substrate;
source/drain regions respectively formed on each side of the semiconductor channel layer;
a polymer adhesive layer formed on the semiconductor channel layer;
a first insulating layer formed on the polymer adhesive layer;
a second insulating layer formed on the first insulating layer;
a ferroelectric layer formed on the second insulating layer;
a gate electrode formed on the ferroelectric layer; and,
source/drain electrodes respectively formed on the source/drain regions.
2. The transistor-type flexible nonvolatile ferroelectric memory device of claim 1 ,
wherein each of the first insulating layer and the second insulating layer includes a material selected from a group consisting of TiO 2 , SrTiO x , ZrO 2 , LiNbO 3 , Al 2 O 3 SiO 2 and a combination thereof.
3. The transistor-type flexible nonvolatile ferroelectric memory device of claim 1 ,
wherein the polymer adhesive layer includes a material selected from a group consisting of epoxy resin, cytop, polyimide, benzocyclobutene, polydimethylsiloxane (PDMS), PMMA (Poly(methylmethacrylate)), polyurethane, polyvinylphenol, and a combination thereof.
4. The transistor-type flexible nonvolatile ferroelectric memory device of claim 1 ,
wherein the ferroelectric layer is formed by a vacuum deposition or a sol-gel method.
5. A transistor-type flexible nonvolatile ferroelectric memory device comprising:
a semiconductor channel layer formed on a flexible substrate;
source/drain regions respectively formed on each side of the semiconductor channel layer;
a barrier layer formed on the semiconductor channel layer;
a ferroelectric layer formed on the barrier layer;
source/drain electrodes respectively formed on the source/drain regions; and
a gate electrode formed on the ferroelectric layer.
6. The transistor-type flexible nonvolatile ferroelectric memory device of claim 5 , wherein the barrier layer is an insulating layer.
7. The transistor-type flexible nonvolatile ferroelectric memory device of claim 6 , wherein the insulating barrier layer includes a material selected from a group consisting of TiO 2 , SrTiO x , ZrO 2 , LiNbO 3 , Al 2 O 3 , SiO 2 and a combination thereof.
8. The transistor-type flexible nonvolatile ferroelectric memory device of claim 5 ,
wherein the ferroelectric layer is formed by a vacuum deposition or a sol-gel method.