Pad design for circuit under pad in semiconductor devices
Embodiments of a semiconductor device that includes a semiconductor substrate and a cavity disposed in the semiconductor substrate that extends at least from a first side of the semiconductor substrate to a second side of the semiconductor substrate. The semiconductor device also includes an insulation layer disposed over the first side of the semiconductor substrate and coating sidewalls of the cavity. A conductive layer including a bonding pad is disposed over the insulation layer. The conductive layer extends into the cavity and connects to a metal stack disposed below the second side of the semiconductor substrate. A through silicon via pad is disposed below the second side of the semiconductor substrate and connected to the metal stack. The through silicon via pad is position to accept a through silicon via.
1. A semiconductor device, comprising:
a semiconductor substrate;
a cavity disposed in the semiconductor substrate extending at least from a first side of the semiconductor substrate through a second side of the semiconductor substrate;
an insulation layer disposed over the first side of the semiconductor substrate and coating sidewalls of the cavity;
a conductive layer disposed over the insulation layer and disposed in the cavity, wherein the conductive layer includes a bonding pad above the first side of the semiconductor substrate, and wherein the conductive layer connects to a metal stack at a bottom of the cavity wherein the bottom of the cavity is opposite the first side of the semiconductor substrate;
a through silicon via (“TSV”) pad disposed below the bottom of the semiconductor substrate and connected to the metal stack, wherein the TSV pad is positioned to accept a TSV;
a handle substrate disposed below the TSV pad; and
a TSV running through the handle substrate and connecting with the TSV pad.
2. The semiconductor device of claim 1 , wherein the semiconductor device comprises an image sensor, the image sensor further comprising:
circuitry disposed in the semiconductor substrate, wherein the circuitry is disposed under the bonding pad.
3. The semiconductor device of claim 2 , wherein the cavity is on an outside perimeter of the semiconductor substrate to maximize the area of continuous semiconductor substrate.
4. The semiconductor device of claim 2 , further comprising:
an inter-layer dielectric disposed between the metal stack and the semiconductor substrate, wherein the cavity extends through the inter-layer dielectric.
5. The semiconductor device of claim 2 , wherein the metal stack includes a plurality of metal interconnect layers, and wherein a portion of the TSV pad is disposed directly below at least one metal interconnect layer in the metal stack, the at least one metal interconnect layer disposed directly below and connected to circuitry disposed directly below the bonding pad.
6. The semiconductor device of claim 1 , wherein the TSV connects the TSV pad to an off-chip signal.
7. The semiconductor device of claim 1 , wherein a bottom portion of the conductive layer is disposed along the bottom of the cavity, and wherein an available electrical path between the TSV and the bottom portion of the conductive layer is positioned on either side of the bottom portion of the conductive layer for an entire distance between the TSV and the bottom portion of the conductive layer, the available electrical path running through the metal stack and the TSV pad.