Non-conducting zirconium dioxide
A resistance thermometer is provided having a measuring resistor in a form of a 0.1 to 10 μm thick structured platinum layer applied to an electrically insulated surface of a substrate and an electrically insulating coating layer covering the platinum layer. The substrate or its surface contains zirconium dioxide, which is stabilized with oxides of a trivalent and a pentavalent metal. Preferably, the trivalent metal is yttrium and the pentavalent metal is tantalum or niobium. The characteristic curve of the measuring resistor preferably conforms to DIN-IEC 751. For mass production of resistance thermometers having high and reproducible measurement accuracy, a structured platinum layer having a thickness of 0.1 to 10 μm is applied to an electrically insulating substrate having a thermal expansion coefficient in the range of 8.5 to 10.5×10 −6 /° K and a roughness less than 1 μm, and the structured platinum layer is covered by an electrical insulator. The resistance thermometers allow precise temperature measurement between −200° C. and +850° C., preferably as a sensor in an exhaust gas treatment system. In a substance-sensitive sensor having a circuit path structure on a substrate, the circuit path structure has an epitaxially applied base layer, and a substance-sensitive metal layer attached to the epitaxially applied base layer.
1. A resistance thermometer comprising a measuring resistor having a form of a 0.1 to 10 μm thick structured platinum layer deposited on an electrically insulating surface of a substrate and an electrically insulating cover layer for the platinum layer, wherein the substrate or its surface contains zirconium dioxide stabilized with 20 to 40 mol % of a stabilizer comprising an oxide of a trivalent metal and an oxide of a pentavalent metal, wherein the trivalent metal is yttrium and wherein the pentavalent metal is tantalum or niobium, and wherein the substrate exhibits a high fracture strength.
2. The resistance thermometer according to claim 1 , wherein a characteristic curve of the measuring resistor satisfies DIN-IEC 751.
3. The resistance thermometer according to claim 1 , which is capable of temperature measurements above 500° C.
4. The resistance thermometer according to claim 3 , wherein the thermometer is a sensor of an exhaust-gas treatment system.
5. A method for mass production of resistance thermometers having high and reproducible measurement accuracy, the method comprising depositing a structured 0.1 to 10 μm thick platinum layer on an electrically insulating substrate having a thermal expansion coefficient in a range of 8.5 to 10.5×10 −6 /° K and a roughness under 1 μm, and covering the structured platinum layer in an electrically insulating way, wherein the substrate or its surface contains zirconium dioxide stabilized with 20 to 40 mol % of a stabilizer stabilized with an oxide of a trivalent metal and an oxide of a pentavalent metal, wherein the trivalent metal is yttrium and the pentavalent metal is tantalum or niobium, and wherein the substrate exhibits a high fracture strength.
6. The resistance thermometer according to claim 1 , wherein the content of stabilizer is about 25 to 35 mol %.
7. The resistance thermometer according to claim 1 , wherein the stabilizer comprises 16 mol % yttrium and 16 mol % tantalum.
8. The method according to claim 5 , wherein the content of stabilizer is about 25 to 35 mol %.
9. The method according to claim 5 , wherein the stabilizer comprises 16 mol % yttrium and 16 mol % tantalum.