Method of manufacturing nanoimprint stamp
Methods of manufacturing a nanoimprint stamp are provided. The method may include forming a pattern on a surface of a master substrate, depositing an etch barrier layer on a surface of a stamp substrate, coating a photoresist on one of the surfaces of the master substrate and the stamp substrate on which an etch barrier layer is formed, forming a photoresist pattern by pressing the master substrate against the stamp substrate, forming a hard mask by etching the etch barrier layer using the photoresist pattern, and etching the stamp substrate using the hard mask as an etch mask.
1. A method of manufacturing a nanoimprint stamp, the method comprising:
forming a pattern on a surface of a master substrate;
coating a first photoresist on one of a surface of a first stamp substrate and the surface of the master substrate;
pressing the master substrate against the first stamp substrate to compress the first photoresist;
forming a first photoresist pattern on the first stamp substrate by hardening the first photoresist;
removing the master substrate;
coating a second photoresist on one of surfaces of the first photoresist pattern and a second stamp substrate;
pressing the first stamp substrate against the second stamp substrate to compress the second photoresist;
forming a second photoresist pattern on the second stamp substrate by hardening the second photoresist;
removing the first stamp substrate; and
etching the second stamp substrate using the second photoresist pattern as an etch mask.
2. The method of claim 1 , wherein the master substrate is a silicon substrate.
3. The method of claim 1 , wherein each of the first and second stamp substrates includes at least one of one of quartz, glass, and polymer.
4. The method of claim 1 , wherein the first photoresist is an ultraviolet ray hardening photoresist, and hardening the first photoresist includes irradiating ultraviolet rays onto the first stamp substrate.
5. The method of claim 1 , wherein the second photoresist is an ultraviolet ray hardening photoresist, and hardening the second photoresist includes irradiating ultraviolet rays onto at least one of the first stamp substrate and the second stamp substrate.
6. The method of claim 1 , wherein one of the first photoresist and the second photoresist includes a fluorine resin.
7. The method of claim 1 , further comprising:
coating a fluorine resin layer on the first photoresist pattern.
8. A method of manufacturing a nanoimprint stamp, the method comprising:
forming a pattern on a surface of a master substrate;
coating a first photoresist on one of the surface of the master substrate and a surface of a first stamp substrate;
pressing the master substrate against the first stamp substrate to compress the first photoresist;
forming a first photoresist pattern on the first stamp substrate by hardening the first photoresist;
removing the master substrate;
depositing an etch barrier layer on a surface of a second stamp substrate;
coating a second photoresist on one of surfaces of the first photoresist pattern and the etch barrier layer;
pressing the first stamp substrate against the second stamp substrate to compress the second photoresist;
forming a second photoresist pattern on the second stamp substrate by hardening the second photoresist;
removing the first stamp substrate;
forming a hard mask by etching the etch barrier layer using the second photoresist pattern; and
etching the second stamp substrate using the hard mask as an etch mask.
9. The method of claim 8 , wherein the etch barrier layer includes at least on of a metal, an oxide, and a nitride.
10. The method of claim 9 , wherein the etch barrier includes one of a first metal comprising at least one of Cr, Ti, Ta, Pt, Au, and Mo and a metal oxide or a metal nitride that is formed by combining oxygen or nitrogen with the first metal.
11. The method of claim 10 , wherein the etch barrier layer is formed to have a thickness in a range from about 1 nm to about 20 nm.
12. The method of claim 9 , wherein the etch barrier layer includes one of SiO 2 , ITO, and Si 3 N 4 .
13. The method of claim 8 , wherein the master substrate is a silicon substrate.
14. The method of claim 8 , wherein each of the first and second stamp substrates includes at least one of quartz, glass, and polymer.
15. The method of claim 8 , wherein the first photoresist is an ultraviolet ray hardening photoresist, and hardening the first photoresist includes irradiating ultraviolet rays onto the first stamp substrate.
16. The method of claim 8 , wherein the second photoresist is an ultraviolet ray hardening photoresist, and hardening the second photoresist includes irradiating ultraviolet rays onto at least one of the first stamp substrate and the second stamp substrate.
17. The method of claim 8 , wherein one of the first photoresist and the second photoresist includes a fluorine resin.
18. The method of claim 8 , further comprising:
forming a fluorine resin layer on the first photoresist pattern.