Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus
A solid-state imaging device includes pixels each having a photoelectric conversion element for converting incident light to an electric signal, color filters associated with the pixels and having a plurality of color filter components, microlenses converging the incident light through the color filters to the photoelectric conversion elements, a light shielding film disposed between the color filter components of the color filters, and a nonplanarized adhesive film provided between the color filters and the light shielding film.
1. A solid-state imaging device comprising:
pixels each having a photoelectric conversion element for converting incident light to an electric signal;
color filters associated with the pixels and having a plurality of color filter components;
microlenses converging the incident light through the color filters to the photoelectric conversion elements; a light shielding film disposed between the color filter components of the color filters;
a nonplanarized adhesive film provided between the color filters and the light shielding film; and
an insulator film disposed between the photoelectric conversion elements and the light shielding film;
wherein the color filters are embedded in the insulator film.
2. The solid-state imaging device according to claim 1 , wherein an oxide film is provided between the adhesive film and the light shielding film.
3. The solid-state imaging device according to claim 2 , wherein the oxide film is provided on one surface of the light shielding film.
4. The solid-state imaging device according to claim 1 , further comprising:
a substrate, wherein the light shielding film, color filters, and microlenses are disposed on a top face of the substrate; and
a wiring layer disposed below a bottom face of the substrate.
5. The solid-state imaging device according to claim 1 ,
wherein the nonplanarized adhesive film comprises a thermoplastic resin material.
6. The solid-state imaging device according to claim 5 ,
wherein the nonplanarized adhesive film comprises at least one of: an acrylic resin, a phenolic resin, a siloxane resin, and a copolymer resin of acrylic, phenolic or siloxane resins.
7. The solid-state imaging device according to claim 1 , wherein the color filters are planarized.
8. The solid-state imaging device according to claim 1 , wherein the adhesive film is provided between one surface of the light shielding film and the color filters.
9. An electronic apparatus comprising:
the solid-state imaging device according to claim 1 ;
an optical lens guiding the incident light to the photoelectric conversion elements; and
a signal processing circuit processing the electric signal.
10. A solid-state imaging device comprising:
pixels each having a photoelectric conversion element for converting incident light to an electric signal;
color filters associated with the pixels and having a plurality of color filter components;
microlenses converging the incident light through the color filters to the photoelectric conversion elements; a light shielding film disposed between the color filter components of the color filters;
a nonplanarized adhesive film provided between the color filters and the light shielding film, and
a substrate, the light shielding film, color filters, and microlenses being disposed on a top face of the substrate,
wherein the light shielding film has a lattice structure which includes a plurality of segments extending generally parallel to the top face of the substrate so as to correspond to boundaries between pixel regions, each of the segments intersecting at least one other of the segments at one of a plurality of intersection points that correspond to corners of the pixels regions, and
wherein at each of the intersection points a maximum height of the light shielding film is smaller than any maximum height of the light shielding film at any of segment-midpoints of the plurality of segments, said maximum heights being measured in a direction perpendicular to the top face of the substrate.
11. The solid-state imaging device according to claim 10 , wherein the color filters are planarized.
12. The solid-state imaging device according to claim 10 , wherein the adhesive film is provided between one surface of the light shielding film and the color filters.
13. The solid-state imaging device according to claim 10 , wherein an oxide film is provided between the adhesive film and the light shielding film.
14. The solid-state imaging device according to claim 13 , wherein the oxide film is provided on one surface of the light shielding film.
15. The solid-state imaging device according to claim 7 , further comprising:
a substrate, wherein the light shielding film, color filters, and microlenses are disposed on a top face of the substrate; and
a wiring layer disposed below a bottom face of the substrate.
16. The solid-state imaging device according to claim 10 ,
wherein the nonplanarized adhesive film comprises a thermoplastic resin material.
17. The solid-state imaging device according to claim 16 ,
wherein the nonplanarized adhesive film comprises at least one of: an acrylic resin, a phenolic resin, a siloxane resin, and a copolymer resin of acrylic, phenolic or siloxane resins.
18. An electronic apparatus comprising:
the solid-state imaging device according to claim 10 ;
an optical lens guiding the incident light to the photoelectric conversion elements; and
a signal processing circuit processing the electric signal.