Semiconductor device and method for manufacturing the same
View Patent ↗An object of the prevent invention is to provide a semiconductor device having a conductive film, which sufficiently serves as an antenna, and a method for manufacturing thereof. The semiconductor device has an element formation layer including a transistor, which is provided over a substrate, an insulating film provided on the element formation layer, and a conductive film serving as an antenna, which is provided on the insulating film. The insulating film has a groove. The conductive film is provided along the surface of the insulating film and the groove. The groove of the insulating film may be provided to pass through the insulating film. Alternatively, a concave portion may be provided in the insulating film so as not to pass through the insulating film. A structure of the groove is not particularly limited, and for example, the groove can be provided to have a tapered shape, etc.
1. A semiconductor device comprising:
a transistor provided over a substrate;
an insulating film provided over the transistor, wherein a groove is provided in the insulating film;
a conductive film electrically connected to the transistor; and
a protection film provided over the conductive film,
wherein the groove has a coiled shape,
wherein the conductive film is provided over at least the groove of the insulating film so that a surface of the conductive film facing the protection film forms a plurality of concave cross-sectional shapes, and
wherein the conductive film is in contact with the insulating film at a bottom of the groove.
2. A semiconductor device comprising:
a transistor provided over a substrate;
a first insulating film provided over the transistor;
a second insulating film provided over the first insulating film, wherein a groove is provided in the second insulating film so as to expose the first insulating film;
a conductive film in contact with the first insulating film at a bottom of the groove, and electrically connected to the transistor; and
a protection film provided over the conductive film,
wherein the groove has a coiled shape, and
wherein the conductive film is provided over the groove and a portion of the second insulating film so that a surface of the conductive film facing the protection film forms a plurality of concave cross-sectional shapes.
3. A semiconductor device comprising:
an element formation layer comprising a transistor provided over a substrate; and
an antenna formation layer comprising an insulating film and a conductive film,
wherein a groove is provided in the insulating film,
wherein the groove has a coiled shape,
wherein the conductive film is provided over at least the groove of the insulating film,
wherein a lower and an upper surface of the conductive film are configured to form a plurality of concave cross-sectional shapes,
wherein the element formation layer and the antenna formation layer are attached to each other,
wherein the transistor and the conductive film are electrically connected to each other, and
wherein the conductive film is in contact with the insulating film at a bottom of the groove.
4. The semiconductor device according to claim 3 ,
wherein the element formation layer and the antenna formation layer are attached to each other with an adhesive agent.
5. A semiconductor device comprising:
a transistor provided over a substrate;
an insulating film provided over the transistor, wherein a groove is provided in the insulating film; and
a conductive film electrically connected to the transistor,
wherein the groove has a coiled shape,
wherein the conductive film is provided over the groove and a portion of the insulating film,
wherein a lower and an upper surface of the conductive film are configured to form a plurality of concave cross-sectional shapes,
wherein a thickness of the conductive film provided over the groove is different from that provided over the portion of the insulating film, and
wherein the conductive film is in contact with the insulating film at a bottom of the groove.
6. The semiconductor device according to any one of claims 1 to 5 , wherein the conductive film has a coiled shape.
7. The semiconductor device according to any one of claims 1 to 5 , wherein the substrate has a flexibility.
8. The semiconductor device according to any one of claims 1 to 5 , wherein the semiconductor device comprises an IC chip.
9. The semiconductor device according to any one of claims 1 , 3 , and 5 , wherein the groove is formed in parallel to an outer edge of the insulating film and has a plurality of square corners so as to bend the groove from an outer portion to an inner portion.
10. The semiconductor device according to any one of claims 1 , 3 , and 5 , wherein a bottom surface of the conductive film is in contact with the insulating film.
11. The semiconductor device according to any one of claims 1 to 5 , wherein the conductive film has a curved cross section.
12. A method for manufacturing a semiconductor device comprising:
forming an element formation layer comprising a transistor over a substrate;
forming an insulating film over the element formation layer;
forming a groove, which has a coiled shape, in the insulating film by selectively removing the insulating film;
forming a conductive film over the insulating film and the groove so that a lower and an upper surface of the conductive film are configured to form a plurality of concave cross-sectional shapes and the conductive film is in contact with the insulating film at a bottom of the groove;
forming a pattern of the conductive film by selectively removing a part of the conductive film; and
forming a protection film to cover the pattern of the conductive film.
13. A method for manufacturing a semiconductor device comprising:
forming a separation layer over a substrate;
forming an element formation layer comprising a transistor over the separation layer;
forming an insulating film over the element formation layer;
forming a groove, which has a coiled shape, in the insulating film by selectively removing the insulating film;
forming a conductive film over the insulating film and the groove so that a lower and an upper surface of the conductive film are configured to form a plurality of concave cross-sectional shapes and the conductive film is in contact with the insulating film at a bottom of the groove;
forming a pattern of the conductive film by selectively removing a part of the conductive film;
forming a protection film to cover the pattern of the conductive film;
forming an opening by selectively removing the protection film, the insulating film and the element formation layer to expose the separation layer through the opening; and
separating the element formation layer from the substrate.
14. A method for manufacturing a semiconductor device comprising:
forming a separation layer over a first substrate;
forming an element formation layer comprising a transistor over the separation layer;
forming an insulating film over the element formation layer;
forming a groove, which has a coiled shape, in the insulating film by selectively removing the insulating film;
forming a conductive film over the insulating film and the groove so that a lower and an upper surface of the conductive film are configured to form a plurality of concave cross-sectional shapes and the conductive film is in contact with the insulating film at a bottom of the groove;
forming a pattern of the conductive film by selectively removing a part of the conductive film;
forming a protection film to cover the pattern of the conductive film;
forming an opening by selectively removing the protection film, the insulating film and the element formation layer to expose the separation layer through the opening;
attaching a second substrate to a surface of the protection film; and
separating the element formation layer from the first substrate.
15. The method for manufacturing a semiconductor device according to claim 14 , wherein the separating step is conducted by a physical means.
16. The method for manufacturing a semiconductor device according to claim 14 , wherein the second substrate has a flexibility.
17. The method for manufacturing a semiconductor device according to any one of claims 12 to 14 , wherein the pattern of the conductive film has a coiled shape.
18. The method for manufacturing a semiconductor device according to any one of claims 12 to 14 , wherein the insulating film is formed by using a screen printing.
19. The method for manufacturing a semiconductor device according to any one of claims 12 to 14 , wherein the protection film contains an organic resin.
20. The method for manufacturing a semiconductor device according to any one of claims 12 to 14 , wherein the semiconductor device comprises an IC chip.
21. The method for manufacturing a semiconductor device according to any one of claims 12 to 14 , wherein the groove is formed in parallel to an outer edge of the insulating film and has a plurality of square corners so as to bend the groove from an outer portion to an inner portion.
22. The method for manufacturing a semiconductor device according to any one of claims 12 to 14 , wherein a bottom surface of the conductive film is in contact with the insulating film.