Semiconductor module and method for manufacturing semiconductor module
The semiconductor module includes a base and at least one circuit substrate. The at least one circuit substrate has a supporting substrate and a semiconductor element supported by the supporting substrate. The base and/or the supporting substrate has a structure for fitting the at least one circuit substrate with the base.
1. A semiconductor module comprising:
a base; and
at least one circuit substrate, wherein
the at least one circuit substrate includes a supporting substrate and a semiconductor element supported by the supporting substrate, wherein
the base and/or the supporting substrate has a structure for fitting a main surface of the at least one circuit substrate with the base, the main surface facing the base, and
wherein the semiconductor element includes a wide bandgap semiconductor.
2. The semiconductor module according to claim 1 , wherein
the at least one circuit substrate includes a plurality of the circuit substrates, and
each of the plurality of circuit substrates has the supporting substrate and the semiconductor element.
3. The semiconductor module according to claim 1 , further comprising an insulating support supporting a terminal electrically connected to the semiconductor element, the insulating support being attached to the base.
4. The semiconductor module according to claim 1 , wherein
the base has a recess or a protrusion as the structure.
5. The semiconductor module according to claim 4 , wherein
the base has a groove as the structure.
6. The semiconductor module according to claim 5 , wherein
the groove becomes deeper along an extending direction of the groove.
7. The semiconductor module according to claim 1 , further comprising a fixing member fixing the at least one circuit substrate to the base.
8. The semiconductor module according to claim 1 , wherein
the structure is formed asymmetrically about an axis line that passes the center of the main surface of the at least one circuit substrate and is perpendicular to the main surface.
9. The semiconductor module according to claim 1 , wherein the wide bandgap semiconductor is SiC or GaN.
10. A method for manufacturing a semiconductor module comprising a step of
fitting at least one circuit substrate with a base, the at least one circuit substrate including a supporting substrate and a semiconductor element supported by the supporting substrate, wherein
the base and/or the supporting substrate has a structure for fitting a main surface of the at least one circuit substrate with the base, the main surface facing the base, and
wherein the semiconductor element includes a wide bandgap semiconductor.
11. A method for manufacturing a semiconductor module comprising the steps of:
attaching an insulating support supporting a terminal arranged opposed to a groove to a base having the groove;
inserting a first end of a circuit substrate between the terminal and the base, the circuit substrate having a supporting substrate and a semiconductor element supported by the supporting substrate; and
fixing a second end that is different from the first end of the circuit substrate to the base by a fixing member, to electrically connect the terminal to the semiconductor element and to fit the circuit substrate with the groove of the base.
12. The method for manufacturing a semiconductor module according to claim 11 , wherein
the groove becomes deeper toward the terminal along an extending direction of the groove.