Method of forming a borderless contact structure employing dual etch stop layers
Each gate structure formed on the substrate includes a gate dielectric, a gate conductor, a first etch stop layer, and a gate cap dielectric. A second etch stop layer is formed over the gate structures, gate spacers, and source and drain regions. A first contact-level dielectric layer and a second contact-level dielectric layer are formed over the second etch stop layer. Gate contact via holes extending at least to the top surface of the gate cap dielectrics are formed. Source/drain contact via holes extending to the interface between the first and second contact-level dielectric layers are subsequently formed. The various contact via holes are vertically extended by simultaneously etching exposed gate cap dielectrics and exposed portions of the first contact-level dielectric layer, then by simultaneously etching the first and second etch stop layers. Source/drain contact vias self-aligned to the outer surfaces gate spacers are thereby formed.
1. A method of forming a semiconductor structure comprising:
forming at least one gate structure on a semiconductor substrate, wherein each of said at least one gate structure includes, from bottom to top, a gate dielectric, a gate conductor, a first etch stop layer, and a gate cap dielectric;
forming a second etch stop layer on said at least one gate structure;
forming a stack of a first contact-level dielectric layer and a second contact-level dielectric layer over said second etch stop layer;
forming at least one gate contact via hole and at least one source/drain contact via hole within said stack of said first and second contact-level dielectric layers;
simultaneously extending said at least one gate contact via hole and said at least one source/drain contact via hole, wherein said at least one source/drain contact via hole is extended through said first contact-level dielectric layer stopping on said second etch stop layer and said at least one gate contact via hole is extended through one of said at least one gate cap dielectric stopping on one of said at least one first etch stop layer, respectively, during said simultaneous extension; and
etching exposed portions of said at least one first etch stop layer in said at least one gate contact via hole and etching exposed portions of said second etch stop layer in said at least one source/drain contact via hole.
2. The method of claim 1 , wherein said exposed portions of said at least one first etch stop layer and said exposed portions of said second etch stop layer are etched simultaneously.
3. The method of claim 1 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a material that is different from a material of said at least one gate cap dielectric and said first contact-level dielectric material layer.
4. The method of claim 1 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a material selected from silicon oxide, silicon nitride, and a dielectric metal oxide.
5. The method of claim 4 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a dielectric metal oxide.
6. The method of claim 5 , wherein each of said at least one first etch stop layer and said second etch stop layer is selected from HfO 2 , Y 2 O 3 , and Al 2 O 3 .
7. The method of claim 5 , wherein said at least one first etch stop layer and said second etch stop layer comprise a same dielectric metal oxide.
8. The method of claim 1 , wherein said at least one first etch stop layer includes a conductive metallic compound.
9. The method of claim 1 , further comprising forming at least one gate spacer on said at least one gate structure, wherein said second etch stop layer is formed directly on said at least one gate spacer, and said at least one source/drain contact via hole stops on an outer surface of said at least one gate spacer after said etching of said exposed portions of said second etch stop layer.
10. The method of claim 1 , wherein said at least one gate cap dielectric and said first contact-level dielectric layer comprise a first dielectric material, and said second contact-level dielectric layer comprise a second dielectric material different from said first dielectric material.
11. A method of forming a semiconductor structure comprising: forming at least one gate structure on a semiconductor substrate, wherein each of said at least one gate structure includes, from bottom to top, a gate dielectric, a gate conductor, a first etch stop layer, and a gate cap dielectric; forming a second etch stop layer on said at least one gate structure; forming raised source/drain regions on a top surface of said semiconductor substrate after forming at least one gate spacer on said at least one gate structure and before forming said second etch stop layer; forming a stack of a first contact-level dielectric layer and a second contact-level dielectric layer over said second etch stop layer; forming at least one gate contact via hole and at least one source/drain contact via hole within said stack of said first and second contact-level dielectric layers; and simultaneously extending said at least one gate contact via hole and said at least one source/drain contact via hole, wherein said at least one source/drain contact via hole is extended through said first contact-level dielectric layer stopping on said second etch stop layer and said at least one gate contact via hole is extended through one of said at least one gate cap dielectric stopping on one of said at least one first etch stop layer, respectively, during said simultaneous extension.
12. The method of claim 11 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a material that is different from a material of said at least one gate cap dielectric and said first contact-level dielectric material layer.
13. The method of claim 11 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a material selected from silicon oxide, silicon nitride, and a dielectric metal oxide.
14. The method of claim 13 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a dielectric metal oxide.
15. The method of claim 11 , further comprising etching exposed portions of said second etch stop layer in said at least one source/drain contact via hole, wherein said second etch stop layer is formed directly on said at least one gate spacer, and said at least one source/drain contact via hole stops on an outer surface of said at least one gate spacer after said etching of said exposed portions of said second etch stop layer.
16. A method of forming a semiconductor structure comprising:
forming at least one gate structure on a semiconductor substrate, wherein each of said at least one gate structure includes, from bottom to top, a gate dielectric, a gate conductor, a first etch stop layer, and a gate cap dielectric;
forming a second etch stop layer on said at least one gate structure;
forming a stack of a first contact-level dielectric layer and a second contact-level dielectric layer over said second etch stop layer;
forming at least one gate contact via hole and at least one source/drain contact via hole within said stack of said first and second contact-level dielectric layers; simultaneously extending said at least one gate contact via hole and said at least one source/drain contact via hole, wherein said at least one source/drain contact via hole is extended through said first contact-level dielectric layer stopping on said second etch stop layer and said at least one gate contact via hole is extended through one of said at least one gate cap dielectric stopping on one of said at least one first etch stop layer, respectively, during said simultaneous extension, wherein said at least one gate contact via hole extends through said second and first contact-level dielectric layers and to a surface of said at least one gate cap dielectric before said simultaneous extending of said at least one gate contact via hole and said at least one source/drain contact via hole, and said at least one source/drain contact via hole extends through said second contact-level dielectric layer and does not extend through said first contact-level dielectric layer before said simultaneous extending of said at least one gate contact via hole and said at least one source/drain contact via hole.
17. The method of claim 16 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a material that is different from a material of said at least one gate cap dielectric and said first contact-level dielectric material layer.
18. The method of claim 16 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a material selected from silicon oxide, silicon nitride, and a dielectric metal oxide.
19. The method of claim 18 , wherein each of said at least one first etch stop layer and said second etch stop layer comprises a dielectric metal oxide.
20. The method of claim 16 , further comprising forming at least one gate spacer on said at least one gate structure, wherein said second etch stop layer is formed directly on said at least one gate spacer, and said at least one source/drain contact via hole stops on an outer surface of said at least one gate spacer after said etching of said exposed portions of said second etch stop layer.