Method for forming an adhesive layer and adhesive composition
In a forming method of an adhesive layer including the steps of selectively coating, on a surface to be bonded, an adhesive composition containing a thermosetting composition and an organic solvent using a noncontact coating device; and removing the organic solvent from the adhesive composition coated on the surface to be bonded and in a forming method of an adhesive layer characterized in the thermosetting composition has a hardening property so as to exhibit two kinds of reaction temperatures, the adhesive composition comprising an epoxy resin and an epoxy curing agent which are reacted through a first hardening reaction exhibiting a first DSC peak within a temperature range of 100 to 160° C. and a second hardening reaction relating to a self-polymerization of the epoxy resin and exhibiting a second DSC peak within a temperature range of 140 to 200° C.
1. A method of forming an adhesive layer on a wafer, comprising:
selectively coating, on a surface of the wafer to be bonded, an adhesive composition containing a thermosetting composition, first and second kinds of hardening reactive compositions with respective first and second kinds of curing accelerators which are different from each other, the first hardening reactive composition having reactive property at a first temperature and the second hardening reactive composition having reactive property at a second temperature higher than the first temperature, and an organic solvent using a noncontact coating device; and
removing the organic solvent from the adhesive composition coated on the surface to be bonded,
wherein the thermosetting composition has a hardening property so as to exhibit two kinds of reaction temperatures.
2. The forming method according to claim 1 ,
wherein the thermosetting composition has a lower temperature reaction peak and a higher temperature reaction peak in differential scanning calorimetry (DSC) which are related to the two kinds of reaction temperatures, and
wherein the lower temperature reaction peak is separated from the higher temperature reaction peak by 10° C. or more.
3. The forming method as according to claim 2 ,
wherein the thermosetting composition contains an epoxy resin, an epoxy curing agent, and the first and second kinds of curing accelerators.
4. The forming method according to claim 1 ,
wherein the thermosetting composition contains an epoxy resin, an epoxy curing agent, and the first and second kinds of curing accelerators.
5. An adhesive composition to be employed in a forming method of an adhesive layer on a wafer comprising selectively coating, on a surface of the wafer to be bonded, an adhesive composition containing a thermosetting composition, first and second kinds of hardening reactive compositions, the first hardening reactive composition having reactive property at a first temperature and the second hardening reactive composition having reactive property at a second temperature higher than the first temperature, and an organic solvent using a noncontact coating device; and removing the organic solvent from the adhesive composition coated on the surface to be bonded,
the adhesive composition comprising an epoxy resin, an epoxy curing agent, and a first curing accelerator which are reacted through a first hardening reaction exhibiting a first DSC peak within a first temperature range of 100 to 160° C., and a second hardening reaction relating to a self-polymerization of the epoxy resin and a second curing accelerator and exhibiting a second DSC peak within a second temperature range of 140 to 200° C.,
wherein the first curing accelerator is different from the second curing accelerator.
6. The adhesive composition according to claim 5 ,
wherein the adhesive composition is rendered in a state of B stage in the removing the solvent.
7. The adhesive composition according to claim 6 ,
having a viscosity of 100 mPa·s or less and a content of the thermosetting composition within a range of 5 to 50 mass %.
8. The adhesive composition according to claim 5 ,
having a viscosity of 100 mPa·s or less and a content of the thermosetting composition within a range of 5 to 50 mass %.
9. An adhesive composition to be employed in a forming method of an adhesive layer on a wafer,
the adhesive composition containing a thermosetting composition, first and second kinds of hardening reactive compositions with respective first and second kinds of curing accelerators, the first hardening reactive composition having reactive property at a first temperature and the second hardening reactive composition having reactive property at a second temperature higher than the first temperature, and an organic solvent,
wherein the thermosetting composition has a hardening property so as to exhibit two kinds of reaction temperatures
wherein the first kind of curing accelerator is different from the second kind of curing accelerator.
10. The adhesive composition according to claim 9 ,
wherein the thermosetting composition has a lower temperature reaction peak and a higher temperature reaction peak in differential scanning calorimetry (DSC) which are related to the two kinds of reaction temperatures, and
wherein the lower temperature reaction peak is separated from the higher temperature reaction peak by 10° C. or more.
11. The adhesive composition according to claim 10 ,
wherein the thermosetting composition contains an epoxy resin, an epoxy curing agent, and the first and second kinds of curing accelerators, which are different from each other.
12. The adhesive composition according to claim 9 ,
wherein the thermosetting composition contains an epoxy resin, an epoxy curing agent, and the first and second kinds of curing accelerators, which are different from each other.