Electromagnetic radiation detecting device comprising an active bolometer and a shielded reference bolometer
View Patent ↗A device for detecting electromagnetic radiation that comprises an active bolometer provided with a first element sensitive to said electromagnetic radiation and a reference bolometer identical to the active bolometer, provided with a second element sensitive to said electromagnetic radiation. The active bolometer and reference bolometer are arranged close to one another on the same substrate. A cover covers at least the part of the second sensitive element exposed to the electromagnetic radiation and arranges an empty space between said second sensitive element and the cover. The inner wall of the cover is constituted by an absorbent layer made from a material absorbing at least the thermal radiations emitted by the second sensitive element. A reflecting shield forms at least a part of the outer wall exposed to said electromagnetic radiation.
1. A device for detecting electromagnetic radiation that comprises on a single substrate:
an active bolometer equipped with a first element sensitive to said electromagnetic radiation,
a reference bolometer identical to the active bolometer, equipped with a second element sensitive to said electromagnetic radiation,
a cover having an outer wall and an inner surface facing towards the second sensitive element, said cover covering at least the part of the second sensitive element exposed to the electromagnetic radiation and arranging an empty space separating the second sensitive element and the inner surface and,
a reflecting shield forming at least a part of the outer wall exposed to said electromagnetic radiation,
wherein the entire inner surface of the cover is constituted by an absorbent layer, said layer being made from a material absorbing at least the thermal radiations emitted by the second sensitive element.
2. The device according to claim 1 , wherein the cover completely encapsulates the second sensitive element.
3. The device according to claim 1 , wherein the cover presses on the substrate.
4. The device according to claim 3 , wherein the cover, with the substrate, forms a closed cavity in which the reference bolometer is housed.
5. The device according to claim 1 , wherein the reference bolometer has an insulating microbridge structure comprising anchorage points and the cover presses on at least two of said anchorage points.
6. The device according to claim 1 , wherein the absorbent layer is a multi-layer.
7. The device according to claim 1 , wherein the absorbent layer is formed by at least one porous metallic absorbent material chosen from black gold, platinum, silver and chromium.
8. The device according to claim 1 , wherein the absorbent layer is formed by at least one polymer material containing graphite.
9. The device according to claim 1 , wherein the absorbent layer is formed by at least one resistive absorbent material chosen from titanium nitride and nichrome.
10. The device according to claim 1 , wherein the cover comprises a support layer arranged between the absorbent layer and a reflecting shield and the active bolometer is encapsulated by a capsule, said support layer being constituted by a material transparent to the electromagnetic radiation emitted by the reference bolometer.
11. The device according to claim 10 , wherein the transparent material of the support layer is chosen from single-crystal, polycrystalline or amorphous silicon, single-crystal or polycrystalline germanium and SiGe alloys.
12. The device according to claim 1 , wherein the cover is 0.5 μm-5 μm above the reference bolometer.
13. A device for detecting electromagnetic radiation that comprises on a single substrate:
an active bolometer equipped with a first element sensitive to said electromagnetic radiation,
a reference bolometer identical to the active bolometer, equipped with a second element sensitive to said electromagnetic radiation,
a cover having an outer wall and an inner wall facing towards the second sensitive element, said cover covering at least the part of the second sensitive element exposed to the electromagnetic radiation and arranging an empty space separating the second sensitive element and the inner wall and,
a reflecting shield forming at least a part of the outer wall exposed to said electromagnetic radiation,
wherein the inner wall of the cover is constituted by an absorbent layer, said layer being made from a material absorbing at least the thermal radiations emitted by the second sensitive element, and
wherein the reference bolometer has an insulating microbridge structure comprising anchorage points and the cover presses on at least two of said anchorage points.