Radiation detection apparatus, scintillator panel, method for manufacturing same and radiation detection system
A radiation detection apparatus comprising a sensor panel and a scintillator panel is provided. The scintillator panel including a substrate, a scintillator disposed on the substrate, and a scintillator protective film that has a first organic protective layer and an inorganic protective layer, and covers the scintillator. The scintillator protective film is located between the sensor panel and the scintillator. The first organic protective layer is located on a scintillator side from the inorganic protective layer. A surface on a sensor panel side of the scintillator is partially in contact with the inorganic protective layer.
1. A radiation detection apparatus comprising a sensor panel and a scintillator panel, the scintillator panel including:
a substrate;
a scintillator disposed on the substrate; and
a scintillator protective film that has a first organic protective layer and an inorganic protective layer, and covers the scintillator, wherein
the scintillator protective film is located between the sensor panel and the scintillator,
the first organic protective layer is located on a scintillator side from the inorganic protective layer, and
a surface on a sensor panel side of the scintillator is partially in contact with the inorganic protective layer.
2. The apparatus according to claim 1 , wherein the scintillator comprises a set of columnar crystals, and tips of the columnar crystals penetrate the first organic protective layer and are in contact with the inorganic protective layer.
3. The apparatus according to claim 1 , wherein the scintillator protective film further comprises a second organic protective layer,
the second organic protective layer is located on the sensor panel side from the inorganic protective layer,
the inorganic protective layer and the scintillator are bonded by the first organic protective layer, and
the inorganic protective layer and the sensor panel are bonded by the second organic protective layer.
4. The apparatus according to claim 3 , wherein
the sensor panel comprises semiconductor members and electrically conductive members forming a pixel array, and
at least some of the semiconductor members and at least some of the electrically conductive members have a part that is in contact with the second organic protective layer.
5. The apparatus according to claim 4 , wherein at least some of the semiconductor members and at least some of the electrically conductive members have a part that penetrates the second organic protective layer and is in contact with the inorganic protective layer.
6. The apparatus according to claim 3 , wherein the sensor panel comprises semiconductor members and electrically conductive members forming a pixel array, and a sensor panel protective film covering the semiconductor members and the electrically conductive members, and
the sensor panel protective film has a part that is in contact with the second organic protective layer.
7. The apparatus according to claim 6 , wherein a part of the sensor panel protective film that covers the semiconductor members and the electrically conductive members includes a part that penetrates the second organic protective layer and is in contact with the inorganic protective layer.
8. The apparatus according to claim 3 , wherein a temperature for bringing the first organic protective layer into a softened state and a temperature for bringing the second organic protective layer into a softened state both are lower than a temperature for bringing the inorganic protective layer into a softened state.
9. The apparatus according to claim 3 , wherein the first organic protective layer and the second organic protective layer are organic resin films, and the inorganic protective layer is an oxide film or a nitride film.
10. A radiation detection system comprising:
the radiation detection apparatus according to claim 1 ; and
a signal processing unit for processing a signal obtained by the radiation detection apparatus.
11. A scintillator panel comprising
a substrate;
a scintillator disposed on the substrate; and
a scintillator protective film that has an organic protective layer and an inorganic protective layer, and covers the scintillator, wherein
the organic protective layer is located on a scintillator side from the inorganic protective layer, and
a surface on an opposite side to a surface on a substrate side, of the scintillator is partially in contact with the inorganic protective layer.
12. A method for manufacturing a radiation detection apparatus, comprising:
forming a scintillator on a substrate;
preparing a scintillator protective film having an organic protective layer and an inorganic protective layer;
covering the scintillator with the scintillator protective film so that the organic protective layer is in contact with the scintillator;
bonding, by thermocompression bonding, the scintillator protective film to the scintillator; and
laminating the scintillator covered with the scintillator protective film and a sensor panel,
wherein in the laminating, a surface on an opposite side to a surface on a substrate side, of the scintillator that enters partially the organic protective layer reaches the inorganic protective layer and stops.
13. A method for manufacturing a scintillator panel comprising:
forming a scintillator on a substrate;
preparing a scintillator protective film having an organic protective layer and an inorganic protective layer;
covering the scintillator with the scintillator protective film so that the organic protective layer is in contact with the scintillator; and
bonding, by thermocompression bonding, the scintillator protective film to the scintillator,
wherein in the bonding by thermocompression bonding, a surface on a side opposite to a surface on a substrate side, of the scintillator that enters partially the organic protective layer reaches the inorganic protective layer and stops.
14. A method for manufacturing a scintillator panel comprising:
preparing a scintillator protective film having an organic protective layer and an inorganic protective layer; and
covering a scintillator formed on a substrate with the scintillator protective film so that the organic protective layer is in contact with the scintillator.
15. The method according to claim 14 , further comprising:
bonding, by thermocompression bonding, the scintillator protective film to the scintillator,
wherein in the bonding by thermocompression bonding, a surface on a side opposite to a surface on a substrate side, of the scintillator that enters partially the organic protective layer reaches the inorganic protective layer and stops.
16. The method according to claim 15 , wherein the scintillator comprises a set of columnar crystals, and tips of the columnar crystals penetrate the first organic protective layer and are in contact with the inorganic protective layer.
17. The method according to claim 15 , wherein
the scintillator protective film further comprises a second organic protective layer,
the second organic protective layer is located on the inorganic protective layer, and
the inorganic protective layer and the scintillator are bonded by the first organic protective layer.
18. The method according to claim 15 , wherein the first organic protective layer and the second organic protective layer are organic resin films, and the inorganic protective layer is an oxide film or a nitride film.