Structure designs and methods for integrated circuit alignment
View Patent ↗Devices and methods for pattern alignment are disclosed. In one embodiment, a semiconductor device includes a die including an integrated circuit region, an assembly isolation region around the integrated circuit region, and a seal ring region around the assembly isolation region. The device further includes a die alignment mark disposed within the seal ring region or the assembly isolation region.
1. A semiconductor device, comprising:
a die including an integrated circuit region, an assembly isolation region around the integrated circuit region, and a seal ring region around the assembly isolation region; and
a plurality of die alignment marks disposed within the seal ring region or the assembly isolation region, wherein the plurality of die alignment marks disposed within the seal ring region are alternately disposed adjacent an outer edge of the seal ring region and an inner edge of the seal ring region.
2. The device of claim 1 , wherein the die alignment mark comprises a critical dimension uniformity pattern including an active (OD) layer, a polysilicon (POLY) layer, a contact (CO) layer, a metal (Mx) layer, and a via (Vx) layer.
3. The device of claim 1 , wherein the die alignment mark comprises a box-in-box alignment pattern.
4. The device of claim 1 , wherein the die alignment mark includes at least one overlay mark formed in an active (OD) layer, a poly (POLY) layer, and/or a contact (CO) layer.
5. The device of claim 1 , further comprising:
a scribe line defining the perimeter of an exposure field; and
an exposure field alignment mark disposed within the scribe line defining the perimeter of the exposure field.
6. The device of claim 1 , wherein the plurality of die alignment marks are not disposed in a corner portion of the seal ring region or the assembly isolation region.
7. A semiconductor device, comprising:
a plurality of exposure fields;
a plurality of dies within each exposure field, wherein each die comprises an integrated circuit region, an assembly isolation region around the integrated circuit region, and a seal ring region around the assembly isolation region;
scribe lines defining each exposure field and each die;
an exposure field alignment mark for each exposure field; and
a die alignment mark for each die, the die alignment mark disposed within the seal ring region or the assembly isolation region of each die, wherein the die alignment mark is disposed in a non-corner portion of the seal ring region or the assembly isolation region and wherein the die alignment mark includes overlay marks formed in an active (OD) layer, a polysilicon (POLY) layer, a contact (CO) layer, a metal (Mx) layer, and a via (Vx) layer.
8. The device of claim 7 , further comprising a plurality of die alignment marks disposed within the seal ring region or the assembly isolation region of each die, wherein the plurality of die alignment marks are disposed in a non-corner portion of the seal ring region or the assembly isolation region.
9. The device of claim 8 , wherein the plurality of die alignment marks disposed within the seal ring region are alternately disposed adjacent an outer edge of the seal ring region and an inner edge of the seal ring region.
10. The device of claim 7 , wherein the overlay marks comprise an overlay mark formed in a lower OD layer, an overlay mark formed in an upper outer CO layer, and an overlay mark formed in an upper inner CO layer.
11. The device of claim 7 , wherein the overlay marks comprise an overlay mark formed in a lower POLY layer, an overlay mark formed in an outer CO layer, and an overlay mark formed in an inner CO layer.
12. The device of claim 7 , wherein the overlay marks comprise an overlay mark formed in a lower POLY layer, an overlay mark formed in an upper outer CO layer, and an overlay mark formed in an upper inner CO layer.
13. The device of claim 7 , wherein the overlay marks comprise an overlay mark formed in a lower OD layer and an overlay mark formed in the POLY layer.
14. A method, comprising:
providing a semiconductor device;
defining a field on the semiconductor device, wherein a perimeter of the field is defined by a scribe line;
defining a die area within the field, wherein each die area includes an integrated circuit region, an assembly isolation region around the integrated circuit region, and a seal ring region around the assembly isolation region; and
forming a plurality of die alignment marks within the seal ring region or the assembly isolation region, wherein the plurality of die alignment marks disposed within the seal ring region are alternately disposed adjacent an outer edge of the seal ring region and an inner edge of the seal ring region.
15. The method of claim 14 , further comprising:
forming a scribe line defining the perimeter of an exposure field; and
forming an exposure field alignment mark disposed within the scribe line defining the perimeter of the exposure field.
16. The method of claim 14 , wherein the plurality of die alignment marks are not formed in a corner portion of the seal ring region or the assembly isolation region.
17. The method of claim 14 , further comprising:
performing a pattern recognition technique to align a mask with the die alignment mark; and
exposing the semiconductor device to form the integrated circuit region.