Semiconductor device and method for manufacturing the same
View Patent ↗A semiconductor device which is miniaturized and has sufficient electrical characteristics to function as a transistor is provided. In a semiconductor device including a transistor in which a semiconductor layer, a gate insulating layer, and a gate electrode layer are stacked in that order, an oxide semiconductor film which contains at least four kinds of elements of indium, gallium, zinc, and oxygen, and in which the percentage of the indium is twice or more as large as each of the percentage of the gallium and the percentage of the zinc when the composition of the four elements is expressed in atomic percentage is used as the semiconductor layer. In the semiconductor device, the oxide semiconductor film is a film to which oxygen is introduced in the manufacturing process and contains a large amount of oxygen, and an insulating layer including an aluminum oxide film is provided to cover the transistor.
1. A method for manufacturing a semiconductor device, comprising the steps of:
performing polishing treatment on a surface of an oxide insulating layer;
forming an oxide semiconductor film over the oxide insulating layer after the polishing treatment;
introducing oxygen into the oxide semiconductor film after forming the oxide semiconductor film;
forming a gate insulating film over the oxide semiconductor film;
forming a gate electrode layer over the gate insulating film, wherein the gate electrode layer overlaps with the oxide semiconductor film;
selectively introducing a dopant to the oxide semiconductor film using the gate electrode layer as a mask; and
forming an insulating layer over the oxide semiconductor film and the gate electrode layer, wherein the insulating layer comprises an aluminum oxide film.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein an average surface roughness of the oxide insulating layer is less than or equal to 0.15 nm.
3. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor film comprises indium, gallium, zinc, and oxygen, and an atomic percentage of the indium is twice or more as large as each of an atomic percentage of the gallium and an atomic percentage of the zinc.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein the insulating layer has a stacked layer structure.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein the insulating layer has a stacked layer structure comprising the aluminum oxide film and a silicon oxide film over the aluminum oxide film.
6. The method for manufacturing a semiconductor device according to claim 1 , wherein a concentration of oxygen in the oxide semiconductor film is greater than or equal to 1×10 18 /cm 3 and less than or equal to 3×10 21 /cm 3 .
7. A method for manufacturing a semiconductor device, comprising the steps of:
performing polishing treatment on a surface of an oxide insulating layer;
forming an oxide semiconductor film over the oxide insulating layer after the polishing treatment;
introducing oxygen into the oxide semiconductor film after forming the oxide semiconductor film;
processing the oxide semiconductor film to be an island-shaped oxide semiconductor film;
forming a gate insulating film over the island-shaped oxide semiconductor film;
forming a gate electrode layer over the gate insulating film, wherein the gate electrode layer overlaps with the island-shaped oxide semiconductor film;
selectively introducing a dopant to the island-shaped oxide semiconductor film using the gate electrode layer as a mask; and
forming an insulating layer over the island-shaped oxide semiconductor film and the gate electrode layer, wherein the insulating layer comprises an aluminum oxide film.
8. The method for manufacturing a semiconductor device according to claim 7 , wherein an average surface roughness of the oxide insulating layer is less than or equal to 0.15 nm.
9. The method for manufacturing a semiconductor device according to claim 7 , wherein the oxide semiconductor film comprises indium, gallium, zinc, and oxygen, and an atomic percentage of the indium is twice or more as large as each of an atomic percentage of the gallium and an atomic percentage of the zinc.
10. The method for manufacturing a semiconductor device according to claim 7 , wherein the insulating layer has a stacked layer structure.
11. The method for manufacturing a semiconductor device according to claim 7 , wherein the insulating layer has a stacked layer structure comprising the aluminum oxide film and a silicon oxide film over the aluminum oxide film.
12. The method for manufacturing a semiconductor device according to claim 7 , wherein a concentration of oxygen in the oxide semiconductor film is greater than or equal to 1×10 18 /cm 3 and less than or equal to 3×10 21 /cm 3 .
13. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor film is formed by a sputtering method using an oxide target having a composition of indium:gallium:zinc=3:1:2.
14. The method for manufacturing a semiconductor device according to claim 7 , wherein the oxide semiconductor film is formed by a sputtering method using an oxide target having a composition of indium:gallium:zinc=3:1:2.