Method for manufacturing a semiconductor device
To provide a highly reliable semiconductor device including a transistor using an oxide semiconductor. After a source electrode layer and a drain electrode layer are formed, an island-like oxide semiconductor layer is formed in a gap between these electrode layers so that a side surface of the oxide semiconductor layer is covered with a wiring, whereby light is prevented from entering the oxide semiconductor layer through the side surface. Further, a gate electrode layer is formed over the oxide semiconductor layer with a gate insulating layer interposed therebetween and impurities are introduced with the gate electrode layer used as a mask. Then, a conductive layer is provided on a side surface of the gate electrode layer in the channel length direction, whereby an Lov region is formed while maintaining a scaled-down channel length and entry of light from above into the oxide semiconductor layer is prevented.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming a source electrode layer and a drain electrode layer over an insulating surface;
forming an oxide semiconductor layer in a gap between the source electrode layer and the drain electrode layer by a coating method;
forming a gate insulating layer in contact with a top surface of the source electrode layer, the drain electrode layer, and the oxide semiconductor layer;
forming a gate electrode layer in a region overlapping with the oxide semiconductor layer with the gate insulating layer interposed therebetween;
introducing an impurity element into the oxide semiconductor layer with the gate electrode layer used as a mask, thereby forming in the oxide semiconductor layer a pair of impurity regions and a channel region sandwiched between the pair of impurity regions;
forming a conductive film covering the gate electrode layer;
forming an insulating layer over the conductive film;
processing the insulating layer, thereby forming a first sidewall insulating layer and a second sidewall insulating layer provided on a side surface of the gate electrode layer in a channel length direction with the conductive film interposed therebetween; and
etching the conductive film with the first sidewall insulating layer and the second sidewall insulating layer used as a mask, thereby forming a first conductive layer and a second conductive layer in contact with the side surface of the gate electrode layer in the channel length direction.
2. The method for manufacturing a semiconductor device, according to claim 1 , further comprising the steps of:
forming an interlayer insulating layer covering the first sidewall insulating layer, the second sidewall insulating layer, and the gate electrode layer;
forming an opening in the interlayer insulating layer and the gate insulating layer so as to reach the source electrode layer or the drain electrode layer; and
forming a wiring layer in the opening.
3. The method for manufacturing a semiconductor device, according to claim 1 , further comprising the steps of:
forming an interlayer insulating layer covering the first sidewall insulating layer, the second sidewall insulating layer, and the gate electrode layer;
forming an opening in the interlayer insulating layer and the gate insulating layer so as to reach the source electrode layer or the drain electrode layer; and
forming a wiring layer in the opening,
wherein a layer including an aluminum oxide film is formed as the interlayer insulating layer.
4. The method for manufacturing a semiconductor device, according to claim 1 , wherein the oxide semiconductor layer comprises a material selected from indium, gallium, and zinc.
5. A method for manufacturing a semiconductor device, comprising the steps of:
forming a source electrode layer and a drain electrode layer over an insulating surface;
forming an oxide semiconductor layer in a gap between the source electrode layer and the drain electrode layer by a coating method, and then performing heat treatment on the oxide semiconductor layer;
forming a gate insulating layer in contact with a top surface of the source electrode layer, the drain electrode layer, and the oxide semiconductor layer;
forming a gate electrode layer in a region overlapping with the oxide semiconductor layer with the gate insulating layer interposed therebetween;
introducing an impurity element into the oxide semiconductor layer with the gate electrode layer used as a mask, thereby forming in the oxide semiconductor layer a pair of impurity regions and a channel region sandwiched between the pair of impurity regions;
forming a conductive film covering the gate electrode layer;
forming an insulating layer over the conductive film;
processing the insulating layer, thereby forming a first sidewall insulating layer and a second sidewall insulating layer provided on a side surface of the gate electrode layer in a channel length direction with the conductive film interposed therebetween; and
etching the conductive film with the first sidewall insulating layer and the second sidewall insulating layer used as a mask, thereby forming a first conductive layer and a second conductive layer in contact with the side surface of the gate electrode layer in the channel length direction.
6. The method for manufacturing a semiconductor device, according to claim 5 , further comprising the steps of:
forming an interlayer insulating layer covering the first sidewall insulating layer, the second sidewall insulating layer, and the gate electrode layer;
forming an opening in the interlayer insulating layer and the gate insulating layer so as to reach the source electrode layer or the drain electrode layer; and
forming a wiring layer in the opening.
7. The method for manufacturing a semiconductor device, according to claim 5 , further comprising the steps of:
forming an interlayer insulating layer covering the first sidewall insulating layer, the second sidewall insulating layer, and the gate electrode layer;
forming an opening in the interlayer insulating layer and the gate insulating layer so as to reach the source electrode layer or the drain electrode layer; and
forming a wiring layer in the opening,
wherein a layer including an aluminum oxide film is formed as the interlayer insulating layer.
8. The method for manufacturing a semiconductor device, according to claim 5 , wherein the oxide semiconductor layer comprises a material selected from indium, gallium, and zinc.