Semiconducor device and method for manufacturing the same
A semiconductor device and a method for manufacturing the same, the method comprising: providing a semiconductor substrate; forming a dummy gate area on the substrate, forming spacers on sidewalls of the gate area, and forming source and drain areas in the semiconductor substrate on both sides of the dummy gate area, the dummy gate area comprising an interface layer and a dummy gate electrode; forming a dielectric cap layer on the dummy gate area and source and drain areas; planarizing the device with the dielectric cap layer on the source and drain areas as a stop layer; further removing the dummy gate electrode to expose the interface layer; and forming replacement gate area on the interface layer. The thickness of the gate groove may be controlled by the thickness of the dielectric cap layer, and the replacement gates of desired thickness and width may be further formed upon requirements. Thus, the aspect ratio of the gate groove is reduced and a sufficient low gate resistance is ensured.
1. A method for manufacturing a semiconductor device, comprising:
A. providing a semiconductor substrate;
B. forming a dummy gate area on the substrate, forming spacers on sidewalls of the gate area, and forming source and drain areas in the semiconductor substrate on both sides of the dummy gate area, the dummy gate area comprising an interface layer and a dummy gate electrode;
C. forming a dielectric cap layer on the dummy gate area and source and drain areas;
C1. forming another dielectric layer on the dielectric cap layer which is different from the dielectric cap layer;
D. planarizing the device with the dielectric cap layer on the source and drain areas as a stop layer so as to remove all of the another dielectric layer;
E. further removing the dummy gate electrode to expose the interface layer;
F. forming a replacement gate area on the interface layer; and
G. performing subsequent processing to the device.
2. The method according to claim 1 , wherein the step F comprises: sequentially depositing a gate dielectric layer and a gate electrode on the device; patterning the gate electrode to form the replacement gate area, wherein the gate electrode has a width larger than or equal to the width of the interface layer.
3. The method according to claim 1 , wherein the step F comprises: sequentially depositing a gate dielectric layer and a gate electrode on the device; patterning the gate electrode and the gate dielectric layer to form the replacement gate area, wherein the gate electrode has a width larger than or equal to the width of the interface layer.
4. The method according to claim 1 , wherein between the step C and step D, the method further comprises: forming a dielectric layer to cover the device, the dielectric layer consisting of a material different from the dielectric cap layer.
5. The method according to claim 1 , wherein between the step E and step F, the method further comprises: removing the interface layer, and re-forming the interface layer.
6. The method according to claim 1 , wherein the dielectric cap layer has a thickness larger than the thickness of the interface layer.
7. The method according to claim 1 , wherein the dielectric cap layer has a thickness of about 5-60 nm.
8. The method according to claim 2 , wherein the gate dielectric layer comprises high-K dielectric materials, and the gate electrode comprises an n-type or p-type metal gate.
9. The method according to claim 1 , wherein the step G comprises: forming replacement spacers on sidewalls of the replacement gate area, forming an interlayer dielectric layer covering the device, and forming contact plugs on the source and drain areas.