Composition for cleaning and rust prevention and process for producing semiconductor element or display element
A composition for cleaning and corrosion inhibition which is used in a step of manufacturing a semiconductor device or a display device having a copper-containing metallic wiring is provided, wherein the corrosion inhibitor component is any one of pyrazole, a pyrazole derivative such as 3,5-dimethylpyrazole, a triazole derivative such as 1,2,4-triazole, an aminocarboxylic acid such as iminodiacetic acid or ethylenediaminedipropionic acid hydrochloride, or a disulfide compound such as diisopropyl disulfide or diethyl disulfide; and the cleaning agent component is any one of ammonium fluoride, tetramethylammonium fluoride, ammonium acetate, acetic acid, glyoxylic acid, oxalic acid, ascorbic acid, 1,2-diaminopropane or dimethylacetamide. Also, a method for manufacturing a semiconductor device or the like using the composition for cleaning and corrosion inhibition is provided.
1. A composition for cleaning and corrosion inhibition which is used during manufacturing of a semiconductor device or a display device having copper-containing metallic wiring, the composition consisting of a) a corrosion inhibitor component, b) a cleaning agent component and c) water as a remnant, wherein
the corrosion inhibitor component is at least one member selected from the group consisting of pyrazole, 3,5-dimethylpyrazole, 3,5-pyrazoledicarboxylic acid monohydrate, pyrazole-1-carboxamidine hydrochloride, 3-amino-5-hydroxypyrazole, 1-phenylpyrazole, 3-amino-4-phenylpyrazole, 1,2,4-triazole, 4-amino-3,5-dimethyl-1,2,4-triazole, iminodiacetic acid, hydroxyethylenediaminetriacetic acid, glycol ether diaminetetraacetic acid, hydroxyethyliminodiacetic acid, triethylenetetraminehexaacetic acid, ethylenediaminedipropionic acid hydrochloride, diisopropyl disulfide, dibutyl disulfide and diethyl disulfide;
the cleaning agent component is at least one member selected from the group consisting of ammonium fluoride, tetramethylammonium fluoride, ammonium acetate, acetic acid, glyoxylic acid, oxalic acid, ascorbic acid, 1,2-diaminopropane and dimethylacetamide; and
the corrosion inhibitor component has a concentration of from 0.001 to 5% by mass, and the cleaning agent component has a concentration of from 0.01 to 90% by mass.
2. The composition for cleaning and corrosion inhibition according to claim 1 , wherein the corrosion inhibitor component has a concentration of from 0.001 to 5% by mass, and the cleaning agent component has a concentration of from 0.01 to 90% by mass.
3. A composition for cleaning and corrosion inhibition which is used during manufacturing of a semiconductor device or a display device having copper-containing metallic wiring, the composition consisting of a) a corrosion inhibitor component, b) a cleaning agent component and c) water as a remnant, wherein
the corrosion inhibitor component is at least one member selected from the group consisting of pyrazole, 3,5-dimethylpyrazole, 3,5-pyrazoledicarboxylic acid monohydrate, pyrazole-1-carboxamidine hydrochloride, 3-amino-5-hydroxypyrazole, 1-phenylpyrazole, 3-amino-4-phenylpyrazole, 1,2,4-triazole, 4-amino-3,5-dimethyl-1,2,4-triazole, iminodiacetic acid, hydroxyethylenediaminetriacetic acid, glycol ether diaminetetraacetic acid, hydroxyethyliminodiacetic acid, triethylenetetraminehexaacetic acid, ethylenediaminedipropionic acid hydrochloride, diisopropyl disulfide, dibutyl disulfide and diethyl disulfide;
the cleaning agent component is at least one member selected from the group consisting of ammonium fluoride, tetramethylammonium fluoride, ammonium acetate, acetic acid, glyoxylic acid, oxalic acid, ascorbic acid, 1,2-diaminopropane and dimethylacetamide; and
the cleaning solution is able to suppress the denaturation of copper during a time from removal of etching residue until just before depositing a diffusion preventive film on a surface of copper wiring and which, at the deposition of the diffusion preventive film, is able to easily remove the corrosion inhibitor component, thereby providing a clean copper surface; and
the corrosion inhibitor component has a concentration of from 0.001 to 5% by mass, and the cleaning agent component has a concentration of from 0.01 to 90% by mass.
4. The cleaning composition of claim 3 , wherein the corrosion inhibitor component is readily removed from the metallic wiring by a heat treatment under a pressure of from 0.001 to 600 Pa and at a temperature of from 100° C. to 300° C.
5. The composition for cleaning and corrosion inhibition according to claim 3 , wherein the corrosion inhibitor component has a concentration of from 0.001 to 5% by mass, and the cleaning agent component has a concentration of from 0.01 to 90% by mass.
6. The composition for cleaning and corrosion inhibition according to claim 1 , wherein the corrosion inhibitor component is readily removed from the metallic wiring by heat treatment under a pressure of from 0.001 to 600 Pa and at a temperature of from 100° C. to 300° C.