Optical member with plate-crystal film, method for producing same, and optical system
An optical member includes a ray effective area, a ray ineffective area, at least one continuous protective film arranged over the ray effective area and at least part of the ray ineffective area, a light-shielding film arranged on the protective film located in the ray ineffective area, and a plate-crystal film arranged on the protective film located in the ray effective area, the plate-crystal film including mainly aluminum oxide and having a textured structure on a surface thereof, and an optical system includes the optical member.
1. A method for producing an optical member including a ray effective area and a ray ineffective area, the method comprising the steps of:
forming at least one continuous protective film over the ray effective area and at least part of the ray ineffective area;
forming a light-shielding film on the protective film located in the ray ineffective area;
after forming the light-shielding film, forming an aluminum-containing film on the protective film located in the ray effective area; and
bringing the aluminum-containing film into contact with hot water to form a plate-crystal film on the protective film located in the ray effective area, the plate-crystal film having a textured structure on a surface thereof and comprising mainly aluminum oxide.
2. The method for producing an optical member according to claim 1 , wherein the protective film contains at least Si.
3. An optical system comprising: the optical member according to claim 2 .
4. The method for producing an optical member according to claim 1 , wherein the protective film contains an organic component.
5. An optical system comprising: the optical member according to claim 4 .
6. The method for producing an optical member according to claim 1 , wherein the plate-crystal film has a textured structure comprising mainly aluminum oxide crystals, aluminum hydroxide crystals, or hydrated aluminum oxide crystals.
7. An optical member produced by the method according to claim 1 .
8. A method for producing an optical member including a ray effective area and a ray ineffective area, the method comprising the steps of:
forming at least one continuous protective film over the ray effective area and at least part of the ray ineffective area;
forming an aluminum-containing film on the protective film;
forming a light-shielding film on the aluminum-containing film located in the ray ineffective area; and
bringing the aluminum-containing film located in the ray effective area into contact with hot water to form a plate-crystal film on the protective film located in the ray effective area, the plate-crystal film having a textured structure on a surface thereof and comprising mainly aluminum oxide.
9. The method for producing an optical member according to claim 8 , wherein the protective film contains at least Si.
10. The method for producing an optical member according to claim 8 , wherein the protective film contains an organic component.
11. The method for producing an optical member according to claim 8 , wherein the plate-crystal film has a textured structure comprising mainly aluminum oxide crystals, aluminum hydroxide crystals, or hydrated aluminum oxide crystals.
12. An optical member produced by the method according to claim 8 .