Calibration of a triaxial magnetic field sensor

1. A method for calibrating a triaxial magnetic field sensor, comprising:

determining, with a processor, an offset of recorded measured values of the magnetic field sensor using a superposed signal; and

determining, with the processor, a sensitivity of the magnetic field sensor along measuring axes;

wherein the determination of the sensitivity includes determining the sensitivity of the magnetic field sensor along a first measuring axis, and determining the sensitivity of the magnetic field sensor along the other measuring axes based on the sensitivity along the first measuring axis and the determined offset, and

wherein the sensitivity along the other measuring axes is determined using a Newton iteration method.

2. The method according to claim 1 , wherein the sensitivity along the first measuring axis is determined by application of a known magnetic field to the magnetic field sensor.

3. The method according to claim 1 , further comprising:

storing recorded measured values which maintain a predetermined minimum distance from all previously stored measured values.

4. The method according to claim 1 , wherein the method is continued after a first pass using additional recorded measured values in order to continuously improve the calibration.

5. The method according to claim 1 , wherein at least one process parameter is adjusted based on a result of the method.

6. The method according to claim 1 , further comprising:

correcting recorded measured values corresponding to the determined sensitivities and the offset.

7. The method according to claim 1 , further comprising:

storing recorded measured values which maintain a predetermined minimum distance from all previously stored measured values; and

determining the sensitivity along the first measuring axis by applying a known magnetic field to the magnetic field sensor.

8. The method according to claim 7 , wherein the storing and determining is continued after a first pass using additional recorded measured values to continuously improve the calibration.

9. The method according to claim 8 , further comprising:

correcting recorded measured values corresponding to the determined sensitivities and the offset.

10. The method according to claim 9 , wherein at least one process parameter is adjusted based on a result of the method.

11. The method according to claim 7 , further comprising:

correcting recorded measured values corresponding to the determined sensitivities and the offset.

12. The method according to claim 11 , wherein at least one process parameter is adjusted based on a result of the method.

13. A non-transitory computer-readable medium having a computer program, which is executable by a processor, comprising:

a program code arrangement having program code for calibrating a triaxial magnetic field sensor, by performing the following:

determining an offset of recorded measured values of the magnetic field sensor using a superposed signal; and

determining a sensitivity of the magnetic field sensor along measuring axes, wherein the determination of the sensitivity includes determining the sensitivity of the magnetic field sensor along a first measuring axis, and determining the sensitivity of the magnetic field sensor along the other measuring axes based on the sensitivity along the first measuring axis and the determined offset, wherein the sensitivity along the other measuring axes is determined using a Newton iteration method.

14. A device for calibrating a triaxial magnetic field sensor, comprising:

a processor for performing the following:

determining an offset of measured values of the magnetic field sensor using a superposed signal;

determining a sensitivity of the magnetic field sensor along a first measuring axis; and

determining a sensitivity of the magnetic field sensor along other measuring axes based on the sensitivity along the first measuring axis and the determined offset, wherein the sensitivity along the other measuring axes is determined using a Newton iteration method.

15. The device according to claim 14 , further comprising:

a unit for applying a known magnetic field to the magnetic field sensor along the first measuring axis.