Microfluidic device having improved epoxy layer adhesion
A microfluidic device includes a substrate; at least one inorganic layer provided on the substrate; a patterned epoxy layer formed over the at least one inorganic layer, the patterned epoxy layer including a wall that defines a location for a fluid in the microfluidic device; and an alkoxysilane material containing a primary or secondary amine for promoting adhesion between the at least one inorganic layer and the patterned epoxy layer.
1. A microfluidic device comprising:
a substrate;
at least one inorganic layer provided on the substrate;
a patterned epoxy layer formed over the at least one inorganic layer, the patterned epoxy layer including a wall that defines a location for a fluid in the microfluidic device; and
an alkoxysilane material containing a primary or secondary amine for promoting adhesion between the at least one inorganic layer and the patterned epoxy layer.
2. The microfluidic device of claim 1 , wherein the alkoxysilane material is hydrolyzed or partially hydrolyzed.
3. The microfluidic device of claim 1 , wherein the alkoxysilane material comprises aminopropyl trimethoxysilane, bis[3-(trimethoxysily)-propyl]amine, n-[3-(trimethoxysily)propyl]-ethylenediamine, 1,2-bis(trimethoxysily) ethane, or a-amino propyltriethoxysilane.
4. The microfluidic device of claim 1 , wherein the epoxy layer comprises an alkoxysilane material containing an epoxide.
5. The microfluidic device of claim 1 , wherein the epoxy layer comprises an SU-8 epoxy.
6. The microfluidic device of claim 1 , wherein the wall defines a chamber for holding a liquid.
7. The microfluidic device of claim 1 , wherein the wall defines a passageway for a liquid.
8. The microfluidic device of claim 1 , wherein the wall has a height between 0.5 microns and 20 microns.
9. The microfluidic device of claim 1 , wherein the at least one inorganic layer comprises a metal.
10. The microfluidic device of claim 1 , wherein the at least one inorganic layer comprises silicon.
11. The microfluidic device of claim 1 , wherein the at least one inorganic layer comprises an oxide.
12. The microfluidic device of claim 1 , wherein the at least one inorganic layer comprises a nitride.
13. An inkjet printhead comprising:
a substrate;
at least one inorganic layer provided on the substrate;
a patterned epoxy layer formed over the at least one inorganic layer, the patterned epoxy layer including a wall that defines a location for an ink in the inkjet printhead; and
an alkoxysilane material containing a primary or secondary amine for promoting adhesion between the at least one inorganic layer and the patterned epoxy layer.
14. The inkjet printhead of claim 13 , wherein the alkoxysilane material is hydrolyzed or partially hydrolyzed.
15. The inkjet printhead of claim 13 , wherein the epoxy layer comprises an SU-8 epoxy.
16. The inkjet printhead of claim 13 , wherein the wall defines a chamber for holding the ink.
17. The inkjet printhead of claim 13 , wherein the wall defines a passageway for the ink.
18. The inkjet printhead of claim 13 , wherein the wall has a height between 0.5 microns and 20 microns.
19. The inkjet printhead of claim 13 , wherein the at least one inorganic layer comprises tantalum.
20. The inkjet printhead of claim 13 , wherein the at least one inorganic layer comprises silicon.
21. The inkjet printhead of claim 13 , wherein the at least one inorganic layer comprises an oxide.
22. The inkjet printhead of claim 13 , wherein the at least one inorganic layer comprises a nitride.
23. The inkjet printhead of claim 13 , wherein the alkoxysilane material comprises aminopropyl trimethoxysilane, bis[3-(trimethoxysily)-propyl]amine or a-amino propyltriethoxysilane.
24. The inkjet printhead of claim 13 , wherein the ink is an aqueous based ink.
25. The inkjet printhead of claim 13 , wherein the ink is a pigmented ink.