Contact structure of semiconductor device
The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a semiconductor layer on the sidewalls and bottom of the opening; a dielectric layer on the semiconductor layer; and a metal layer filling an opening of the dielectric layer.
1. A contact structure for a semiconductor device comprising:
a substrate comprising a major surface and a trench below the major surface;
a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate;
an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom;
a semiconductor layer on the sidewalls and bottom of the opening;
a dielectric layer on the semiconductor layer; and
a metal layer filling an opening of the dielectric layer.
2. The contact structure of claim 1 , wherein the semiconductor layer has a thickness ranging from 0.3 nm to 1.5 nm.
3. The contact structure of claim 1 , wherein the dielectric layer has a thickness ranging from 1 nm to 10 nm.
4. The contact structure of claim 1 , wherein the strained material comprises Si, Ge, SiGe, SiC, SiP, or III-V semiconductor material.
5. The contact structure of claim 1 , wherein the semiconductor layer comprises Si or Ge.
6. The contact structure of claim 1 , wherein the dielectric layer comprises TiO or TiO 2 .
7. The contact structure of claim 1 , wherein the dielectric layer comprises Al 2 O 3 .
8. The contact structure of claim 1 , wherein the dielectric layer is selected from an oxide of the group consisting of Zr, Hf, Ta, In, Ni, Be, Mg, Ca, Y, Ba, Sr, Sc, Ga, and mixtures thereof.
9. The contact structure of claim 1 , wherein the metal layer comprises Ta, Ti, Hf, Zr, Ni, W, Co, Cu, or Al.
10. A metal oxide semiconductor field effect transistor (MOSFET) comprising:
a substrate comprising a major surface;
a gate stack on the major surface of the substrate;
a trench below the major surface adjacent to the gate stack;
a shallow trench isolations (STI) region disposed on a side of the trench opposite the gate stack, wherein the STI region is within the substrate; and
a contact structure comprising
a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate;
an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom;
a semiconductor layer on the sidewalls and bottom of the opening, wherein the semiconductor layer has a thickness ranging from 0.3 nm to 1.5 nm;
a dielectric layer on the semiconductor layer, wherein the dielectric layer has a thickness ranging from 1 nm to 10 nm; and
a metal layer filling an opening of the dielectric layer.
11. The MOSFET of claim 10 , wherein the strained material comprises Si, Ge, SiGe, SiC, SiP, or III-V semiconductor material.
12. The MOSFET of claim 10 , wherein the semiconductor layer comprises Si or Ge.
13. The MOSFET of claim 10 , wherein the dielectric layer comprises TiO or TiO 2 .
14. The MOSFET of claim 10 , wherein the dielectric layer comprises Al 2 O 3 .
15. The MOSFET of claim 10 , wherein the dielectric layer is selected from an oxide of the group consisting of Zr, Hf, Ta, In, Ni, Be, Mg, Ca, Y, Ba, Sr, Sc, Ga, and mixtures thereof.
16. The MOSFET of claim 10 , wherein the metal layer comprises Ta, Ti, Hf, Zr, Ni, W, Co, Cu, or Al.