Corrosion-resistant multilayer ceramic member
The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.
1. A corrosion-resistant multilayer ceramic member comprising:
a ceramic support substrate having a first surface, a second surface opposite to the first surface, and a side surface extending from the first surface to the second surface;
an electrode layer formed on and in direct contact with the first surface of the ceramic support substrate;
a power-supply member connected to the electrode layer;
an insulating protection layer covering and in direct contact with the electrode layer, the electrode layer being between the ceramic support substrate and the insulating protection layer;
a ceramic protection substrate comprising:
a first portion provided on the insulating protection layer, the insulating protection layer being between the first portion of the ceramic protection substrate and the electrode layer,
a second portion in direct contact with the first portion, the second portion extending in a direction from the first portion to at least the second surface of the ceramic support substrate, the second portion covering the side surface of the ceramic support substrate, and
a third portion in direct contact with the second portion, the third portion extending over at least a portion of the second surface of the ceramic support substrate, the ceramic support substrate being between the first and thin portions of the ceramic protection substrate; and
a cylindrical column attached to the third portion of the ceramic protection substrate, the cylindrical column housing least a portion of the power-supply member;
wherein the ceramic support substrate, the ceramic protection substrate, and the insulating protection layer contain as a main component any one of aluminum nitride, rare earth oxide, aluminum oxide, silicon oxide, zirconia, and sialon.
2. The corrosion-resistant multilayer ceramic member according to claim 1 , wherein a protection film 0.01 mm or more in thickness is coated to seal in at least one of surface boundary lines at which the ceramic support substrate, the insulating protection layer, the ceramic protection substrate, or the cylindrical column meet with each other or itself.
3. The corrosion-resistant multilayer ceramic member according to claim 2 , wherein the protection film is made of any one of aluminum nitride, rare earth oxide, yttrium fluoride, aluminum oxide, silicon oxide, zirconia, and sialon.
4. The corrosion-resistant multilayer ceramic member according to claim 1 serving as any one of a heater for heating, an electrostatic chuck, and a heater for heating provided with an electrostatic chuck.