IP Library › Granted Patent US 8,829,485
Granted Patent B2
US 8,829,485 · App. 13/353,091 · Granted Sep 9, 2014

Selective emitter nanowire array and methods of making same

Inventors: Faris Modawar (Georgetown, TX); Marcie R. Black (Lincoln, MA); Brian Murphy (Revere, MA); Jeff Miller (Brookline, MA); Mike Jura (Boston, MA)
Assignee: Bandgap Engineering, Inc.
H01L31/035227Y10S977/762
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Quick Facts
Patent No.
US 8,829,485
App. No.
13/353,091
Granted
Sep 9, 2014
Kind
B2
Abstract

Another aspect of the present disclosure relates to a device including a substrate, having a top surface and a bottom surface; an array of nanowires having a base and a top surface, the base contacting the top surface of the substrate; a contacting structure including the same material as the substrate having a non-nanostructured surface of a dimension suitable for forming an electrical contact, located on the same side of the substrate as the array of silicon nanowires; wherein the contacting structure is doped with a greater impurity concentration than the nanowire array, thereby forming a selective emitter.

Claims (29)

1. A device comprising:

(a) a substrate, having a top surface, a bottom surface and a first impurity type;

(b) an array of silicon nanowires having a second impurity type, a base and a top surface, wherein the base contacting a surface below the top surface of the substrate;

(c) a contacting structure comprised of the same material as the substrate having a non-nanostructured surface of a dimension suitable for forming an electrical contact, located on the same side of the substrate as the array of silicon nanowires, wherein the contacting structure having the second impurity type;

wherein the surface of the contacting structure is doped with a greater impurity concentration than the nanowire array, thereby forming a selective emitter;

wherein the top surface of the array of nanowires is at approximately the same level as the non-nanostructured surface of the contacting structure; and

wherein the doping of the nanowire array results in a p-n junction below the base of the nanowire array.

2. The device of claim 1 , wherein the device is a photovoltaic cell.

3. The device of claim 1 , further comprising: (d) a conductive layer in contact with the non-nanostructured surface of the contacting structure.

4. The device of claim 3 , wherein the conductive layer comprises a metal.

5. The device of claim 1 , wherein the dopant level in the contact region is greater than 1e19 cm −3 .

6. The device of claim 1 , wherein the dopant comprises boron, phosphorous, or arsenic.

7. The device of claim 1 , wherein the dopant level in the nanowires is less than 5e18 cm −3 .

8. A device comprising:

(a) a substrate, having a top surface, a bottom surface and a first impurity type;

(b) a section of black silicon having a second impurity type, a base and a top surface, wherein the base contacting a surface below the top surface of the substrate;

(c) a contacting structure comprised of the same material as the substrate having a non-nanostructured surface of a dimension suitable for forming an electrical contact, located on the same side of the substrate as the section of black silicon, wherein the contacting structure having the second impurity type;

wherein the surface of the contacting structure is doped with a greater impurity concentration than the section of black silicon, thereby forming a selective emitter;

wherein the top surface of the black silicon is at approximately the same level as the non-nanostructured surface of the contacting structure; and

wherein the doping of the nanowire array results in a p-n junction below the base of the black silicon.

9. The device of claim 8 , further comprising: (d) a conductive layer in contact with the non-nanostructured surface of the contacting structure.

10. The device of claim 8 , wherein the conductive layer comprises a metal.

11. The device of claim 8 , wherein the dopant level in the contact region is greater than 1e19 cm −3 .

12. The device of claim 8 , wherein the dopant comprises boron, phosphorous, or arsenic.

13. The device of claim 8 , wherein the dopant level in the section of black silicon is less than 5e18 cm −3 .

14. The device of claim 8 , wherein the section of black silicon comprises an array of nanowires.

15. The device of claim 8 , wherein the section of black silicon comprises porous silicon.

16. The device of claim 8 , wherein the section of black silicon comprises silicon having a graded index of refraction.

17. The device of claim 8 , wherein the section of black silicon comprises silicon having a needle-shaped surface structure.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 21, 2015
From: NEW ENTERPRISE ASSOCIATES 12, LP; MASSACHUSETTS GREEN ENERGY FUND I LP; ADAMS, TRACY; BLACK, MARCIE R.; CHLEBOSKI, RICHARD; SHAW, ROBERT W., JR.; DANE SHULMAN ASSOCIATES, LLC
To: ADVANCED SILICON GROUP, INC.
Reel/Frame 036393/0874 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 21, 2015
From: BANDGAP ENGINEERING, INC.
To: MASSACHUSETTS GREEN ENERGY FUND I LP; DANE SHULMAN ASSOCIATES, LLC; CHLEBOSKI, RICHARD; SHAW, ROBERT W., JR.; ADAMS, TRACY; BLACK, MARCIE; NEW ENTERPRISE ASSOCIATES 12, LP
Reel/Frame 036421/0221 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 6, 2012
From: MODAWAR, FARIS; BLACK, MARCIE R.; MURPHY, BRIAN; MILLER, JEFF; JURA, MIKE
To: BANDGAP ENGINEERING, INC.
Reel/Frame 027814/0594 →
Continuity (2)
Provisional Application 61433850 · Jan 18, 2011
Related Publication 20120153251A1 · Jun 21, 2012