Nonvolatile memory device and method for fabricating the same
A nonvolatile memory device may include a plurality of channel layers protruded substantially perpendicularly over a substrate having a well region, a structure configured to have a plurality of interlayer insulating layers and a plurality of gate electrodes alternately stacked along each of the plurality of channel layers, a plurality of memory layers interposed respectively between each of the plurality of channel layers and each of the plurality of gate electrodes, a source line formed in the substrate between a plurality of the structures, a plurality of source contact plugs placed between the plurality of structures and connected with the source line, and a well pickup contact plug placed between the plurality of structures and connected with the well region.
1. A nonvolatile memory device, comprising:
a plurality of channel layers protruded substantially perpendicularly over a substrate having a well region;
a structure configured to have a plurality of interlayer insulating layers and a plurality of gate electrodes alternately stacked along each of the plurality of channel layers;
a plurality of memory layers interposed respectively between each of the plurality of channel layers and each of the plurality of gate electrodes;
a source line formed in the substrate between a plurality of the structures;
a plurality of source contact plugs placed between the plurality of the structures and connected with the source line; and
a well pickup contact plug placed between the plurality of structures and connected with the well region.
2. The nonvolatile memory device of claim 1 , wherein the well pickup contact plug is placed between the plurality of source contact plugs.
3. The nonvolatile memory device of claim 1 , wherein the source contact plugs and the well pickup contact plug extend in a direction substantially identical with a direction of the channel layer.
4. The nonvolatile memory device of claim 1 , wherein the gate electrodes surround a side of the channel layer and extend in one direction.
5. The nonvolatile memory device of claim 1 , further comprising a spacer layer configured to surround sides of each of the source contact plugs and the well pickup contact plug.