Semiconductor device and power converter using it

1. A semiconductor device comprising:

a switching power device; and

a flywheel diode connected to said switching power device in series, said flywheel diode including a region having a Schottky junction to operate as a Schottky diode and a region having a pn junction to operate as a pn diode,

wherein said flywheel diode comprises a gate controlled diode which includes an insulated gate and which is configured to switch alternately between the region having the Schottky junction to operate as a Schottky diode and the region having the pn junction to operate as a pn switch, and

wherein said insulated gate of said flywheel diode is configured to receive a control signal (V GA ) which is synchronized with a gate signal (V GE ) supplied to said switching power device, and said flywheel diode is configured to be controlled by said insulated gate receiving said control signal (V GA ) such that before said switching power device is switched over from off to on by said gate signal (V GE ), a first operation mode in which a current flows primarily through at least said pn diode forwardly is changed to a second operation mode in which the current flows mainly through the Schottky diode to reduce backward recovery current in said semiconductor device when the switching power device is turned on.

2. The semiconductor device according to claim 1 ,

wherein said insulated gate of flywheel diode is further configured to be controlled by said insulated gate receiving said control signal (V GA ) such that before said switching power device is switched over from on to off by said gate signal (V GE ), said flywheel diode is changed from the second operation mode to the first operation mode so that at least said pn diode is allowed to primarily pass the current forwardly to reduce forward voltage drop in the semiconductor device when the switching power device is turned off.

3. The semiconductor device according to claim 1 , wherein

said flywheel diode includes:

a semiconductor substrate having a pair of surfaces;

a first semiconductor layer having a first conductivity type (n) and exposed to one surface of said semiconductor substrate;

a second semiconductor layer having a second conductivity type (p), exposed to the other surface of said semiconductor substrate and contacting said first semiconductor layer, wherein:

said first semiconductor layer and said second semiconductor layer form said pn junction;

a Schottky metal provided on the other surface of said semiconductor substrate and contacting said first semiconductor layer forms said Schottky junction;

said insulated gate bridges said second semiconductor layer of second conductivity type and said Schottky metal;

an anode electrode electrically connects to said Schottky metal through low resistance; and

a cathode electrode contacts said first semiconductor layer on the one surface through low resistance.

4. The semiconductor device according to claim 3 , wherein

by applying to said gate electrode of insulated gate a voltage negative in relation to said anode electrode, said Schottky electrode and said second semiconductor layer are electrically connected to each other.

5. The semiconductor device according to claim 1 wherein said flywheel diode includes:

a semiconductor substrate having a pair of surfaces;

a first semiconductor layer having a first conductivity type (n) and exposed to one surface of said semiconductor substrate;

a second semiconductor layer having a second conductivity type (p), exposed to the other surface of said semiconductor substrate and contacting said first semiconductor layer, wherein said first semiconductor layer and said second semiconductor layer form said pn junction;

a Schottky metal provided on the other surface of said semiconductor substrate;

a third semiconductor layer of second conductivity type having a lower impurity concentration than said second semiconductor layer, said third semiconductor layer being provided between said Schottky metal and said first semiconductor layer, and contacting said Schottky metal to form said Schottky junction;

said insulated gate bridging said second semiconductor layer of second conductivity type and said Schottky metal;

an anode electrode electrically connecting to said Schottky metal through low resistance; and

a cathode electrode contacting said first semiconductor layer on the one surface through low resistance.

6. The semiconductor device according to claim 1 , wherein

said flywheel diode includes:

a semiconductor substrate having a pair of surfaces;

a first semiconductor layer having a first conductivity type (n) and exposed to one surface of said semiconductor substrate;

second semiconductor layers each having a second conductivity type (p), exposed to the other surface of said semiconductor substrate and contacting said first semiconductor layer;

Schottky metals provided on the other surface of said semiconductor substrate and contacting said first semiconductor layer to form Schottky junctions;

fourth semiconductor layers of second conductivity type contacting said first semiconductor layer and formed on the both sides of said Schottky metal opposing said second semiconductor layers;

insulated gates each bridging at least said fourth semiconductor layer and said second semiconductor layer;

an anode electrode electrically connecting to each of said Schottky metals through low resistance; and

a cathode electrode contacting said first semiconductor layer on the one surface through low resistance.

7. The semiconductor device according to claim 6 , further comprising:

a fifth semiconductor layer of second conductivity type having a lower impurity concentration than said second semiconductor layer, said fifth semiconductor layer being provided between said Schottky metal and said first semiconductor layer.

8. The semiconductor device according to claim 6 , wherein

said fourth semiconductor layer has a smaller band gap than that of the other semiconductor layers.

9. The semiconductor device according to claim 1 , wherein

said flywheel diode includes:

a semiconductor substrate having a pair of surfaces;

a first semiconductor layer having a first conductivity type and exposed to one surface of said semiconductor substrate;

a second semiconductor layer having a second conductivity type, exposed to the other surface of said semiconductor substrate and contacting said first semiconductor layer;

said first semiconductor layer and said second semiconductor layer form said pn junction;

a sixth semiconductor layer having the first conductivity type and formed in said second semiconductor layer;

means for short-circuiting electrically said sixth semiconductor layer and said second semiconductor layer;

Schottky metals provided on the other surface of said semiconductor substrate and contacting said first semiconductor layer to form Schottky junctions;

an anode electrode electrically connected to said Schottky metals through low resistance; and

a cathode electrode contacting said first semiconductor layer on the one surface through low resistance,

wherein the insulated gate extends over said Schottky metal, said second semiconductor layer and said sixth semiconductor layer.

10. The semiconductor device and a power converter using it according to claim 9 , wherein

by applying to said gate electrode of insulated gate a voltage positive in relation to said anode electrode, said Schottky metal and said second semiconductor layer are electrically connected to each other.

11. The semiconductor device according to claim 1 said flywheel diode includes:

a semiconductor substrate having a pair of surfaces;

a first semiconductor layer having a first conductivity type and exposed to one surface of said semiconductor substrate;

a second semiconductor layer having a second conductivity type, exposed to the other surface of said semiconductor substrate and contacting said first semiconductor layer;

said first semiconductor layer and said second semiconductor layer form said pn junction;

a sixth semiconductor layer having the first conductivity type and formed in said second semiconductor layer;

means for short-circuiting electrically said sixth semiconductor layer and said second semiconductor layer;

a Schottky metal provided on the other surface of said semiconductor substrate;

a third semiconductor layer of second conductivity type having a lower impurity concentration than said second semiconductor layer, said third semiconductor layer being provided between said Schottky metal and said first semiconductor layer, and contacting said Schottky metal to form said Schottky junction;

an anode electrode electrically connected to said Schottky metal through low resistance; and

a cathode electrode contacting said first semiconductor layer on the one surface through low resistance,

wherein the insulated gate extends over said Schottky metal, said second semiconductor layer and said sixth semiconductor layer.

12. The semiconductor device according to claim 1 , wherein

said flywheel diode includes:

a semiconductor substrate having a pair of surfaces;

a first semiconductor layer having a first conductivity type and exposed to one surface of said semiconductor substrate;

second semiconductor layers having a second conductivity type, exposed to the other surface of said semiconductor substrate and contacting said first semiconductor layer;

a sixth semiconductor layer having the first conductivity type and formed in said second semiconductor layer;

means for short-circuiting electrically said sixth semiconductor layer and said second semiconductor layer;

Schottky metals provided on the other surface of said semiconductor substrate and contacting said first semiconductor layer to form Schottky junctions;

a third semiconductor layer of the second conductivity type provided between said Schottky metal and said first semiconductor layer and having a lower impurity concentration than said second semiconductor layer;

a seventh semiconductor layer of first conductivity type formed between said third semiconductor layer and said Schottky metal;

insulated gates each extending over at least said seventh semiconductor layer, said third semiconductor layer, said first semiconductor layer, said second semiconductor layer and said sixth semiconductor layer on the other surface;

an anode electrode electrically connected to said Schottky metals through low resistance; and

a cathode electrode contacting said first semiconductor layer on the one surface through low resistance.

13. The semiconductor device according to claim 12 , wherein

said third semiconductor layer makes contact to said second semiconductor layer.

14. The semiconductor device according to claim 12 , wherein

said seventh semiconductor layer has a smaller band gap than that of the other semiconductor layers.

15. A power converter comprising:

the semiconductor device according to claim 1 , wherein said switching power device is an Insulated Gate Bipolar Transistor.