Vertical light-emitting devices having patterned emitting unit and methods of manufacturing the same
Example embodiments are directed to a light-emitting device including a patterned emitting unit and a method of manufacturing the light-emitting device. The light-emitting device includes a first electrode on a top of a semiconductor layer, and a second electrode on a bottom of the semiconductor layer, wherein the semiconductor layer is a pattern array formed of a plurality of stacks. A space between the plurality of stacks is filled with an insulating layer, and the first electrode is on the insulating layer.
1. A method of manufacturing a light-emitting device, the method comprising:
stacking a buffer layer and a semiconductor layer on a plurality of protrusions formed in an array pattern, wherein the plurality of protrusions are formed on a first substrate;
filling a trench between the plurality of protrusions with an insulating layer up to a height of the semiconductor layer;
stacking a first electrode layer to cover the semiconductor layer and the insulating layer on the semiconductor layer, and a bonding metal layer;
bonding a second substrate on the bonding metal layer;
removing the first substrate and the buffer layer;
forming a transparent electrode layer on the semiconductor layer; and
forming a second electrode on the transparent electrode layer, wherein,
the forming a transparent electrode layer forms the transparent electrode layer to cover the semiconductor layer and the insulating layer such that a contiguous portion of the transparent electrode extends over multiple protrusions in the plurality of protrusions and the trench between the multiple protrusions,
the filling includes forming the insulating layer to have a grid pattern, and
the forming a second electrode forms the second electrode to have the grid pattern and be substantially aligned with the insulating layer.
2. The method of claim 1 , wherein stacking of the buffer layer and the semiconductor layer comprises:
forming the plurality of protrusions in the pattern array by patterning the first substrate; and
sequentially stacking the buffer layer and the semiconductor layer on the plurality of protrusions.
3. The method of claim 1 , wherein stacking of the buffer layer and the semiconductor layer comprises:
sequentially stacking the buffer layer and the semiconductor layer on the first substrate; and
sequentially patterning the semiconductor layer, the buffer layer, and a surface of the first substrate.
4. The method of claim 1 , wherein a width of the second electrode is less than or equal to a width of the trench.