Photomultiplier and manufacturing method thereof
View Patent ↗Provided are a photomultiplier and a manufacturing method thereof. The manufacturing method thereof may include forming a mask layer on an active region of a substrate doped with a first conductive type, ion implanting a second conductive type impurity opposite to the first conductive type into the substrate to form a first doped region in the active region under the mask layer and an non-active region exposed from the mask layer, forming a device isolation layer on the non-active region, removing the mask layer, and ion implanting the second conductive type impurity having a concentration higher than that of the first doped region into an upper portion of the first doped region in the active region to form a second doped region shallower than the first doped region.
1. A method of manufacturing a photomultiplier, the method comprising:
forming a mask layer on an active region of a substrate doped with a first conductive type;
ion implanting a second conductive type impurity opposite to the first conductive type into the substrate to form a first doped region in the active region under the mask layer and an non-active region exposed from the mask layer;
forming a device isolation layer on the non-active region;
removing the mask layer; and
ion implanting the second conductive type impurity having a concentration higher than that of the first doped region into an upper portion of the first doped region in the active region to form a second doped region shallower than the first doped region.
2. The method of claim 1 , wherein the first doped region is formed by a counter ion implantation process.
3. The method of claim 2 , wherein the counter ion implantation process comprises a multiple ion implantation method.
4. The method of claim 1 , wherein the second doped region is formed by a self-aligned ion implantation process or self-aligned diffusion process of the device isolation layer.
5. The method of claim 1 , wherein the device isolation layer comprises a silicon oxide layer formed by a LOCOS (local oxidation of silicon) method.
6. The method of claim 1 , wherein the mask layer comprises a silicon nitride layer.
7. The method of claim 6 , wherein the silicon nitride layer is removed by a phosphoric acid, a hydrofluoric acid, or a bromic acid.
8. The method of claim 1 , further comprising:
forming a first interlayer dielectric on the second doped region and the device isolation layer;
forming a quench resistor on the first interlayer dielectric in the non-active region;
forming a second interlayer dielectric on the first interlayer dielectric and the quench resistor;
removing a portion of the second interlayer dielectric on the quench resistor and each portion of the first and second interlayer dielectrics on the second doped region to form contact holes;
forming a first interconnection line on the second interlayer dielectric in the non-active region and a second interconnection line connecting the second doped region and the quench resistors through the contact holes; and
forming a bottom electrode on a bottom of the substrate.