Drawing apparatus, and method of manufacturing article
The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, the apparatus including a stage configured to hold the substrate and to be moved, a charged particle optical system including a deflector configured to deflect the plurality of charged particle beams, a detector configured to detect a charged particle arrived thereat by causing a charged particle beam to impinge on a mark including a plurality of mark elements formed on one of the substrate and the stage, and a processor configured to perform a process of obtaining a position of the mark.
1. A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, the apparatus comprising:
a stage configured to hold the substrate and to be moved;
a charged particle optical system including a deflector configured to deflect the plurality of charged particle beams;
a detector configured to detect a charged particle arrived thereat by causing a charged particle beam to impinge on a mark including first and second mark elements formed on one of the substrate and the stage with the charged particle beam undergoing deflection thereof by the deflector; and
a processor configured to perform a process of obtaining a position of the mark,
wherein the processor is configured to control the stage, the charged particle optical system, and the detector such that a position of the first mark element is measured while two ends of the first mark element fall within a range of deflection by the deflector with respect to a first charged particle beam among the plurality of charged particle beams, and a position of the second mark element, different from the first mark element, is measured while two ends of the second mark element fall within a range of deflection by the deflector with respect to a second charged particle beam, among the plurality of charged particle beams, closer to the second mark element than the first charged particle beam.
2. The apparatus according to claim 1 , wherein the processor is configured to select, as the second charged particle beam, a charged particle beam closest to the second mark element among the plurality of charged particle beams, based on the measured position of the first mark element.
3. The apparatus according to claim 1 , wherein the processor is configured to control the stage based on the measured position of the first mark element, so that the two ends of the second mark element fall within the range of deflection by the deflector with respect to the second charged particle beam.
4. The apparatus according to claim 1 , wherein the processor is configured, based on measurement of the first mark element, to determine whether the stage is positioned so that the two ends of the first mark element fall within the range of deflection by the deflector with respect to the first charged particle beam, and to control, if the processor determines that the stage is not positioned as such, the stage, the charged particle optical system, and the detector such that the position of the first mark element is measured using one of the first charged particle beam and another charged particle beam.
5. The apparatus according to claim 1 , wherein the processor is configured, based on measurement of the second mark element, to determine whether the stage is positioned so that the two ends of the second mark element fall within the range of deflection by the deflector with respect to the second charged particle beam, and to control, if the processor determines that the stage is not positioned as such, the stage, the charged particle optical system, and the detector such that the position of the second mark element is measured using one of the second charged particle beam and another charged particle beam.
6. A method of manufacturing an article, the method comprising:
performing drawing on a substrate using a drawing apparatus;
developing the substrate on which the drawing has been performed; and
processing the developed substrate to manufacture the article,
wherein the drawing apparatus performs the drawing on the substrate with a plurality of charged particle beams, and includes
a stage configured to hold the substrate and to be moved;
a charged particle optical system including a deflector configured to deflect the plurality of charged particle beams;
a detector configured to detect a charged particle that arrives thereat by causing a charged particle beam to impinge on a mark including first and second mark elements formed on one of the substrate and the stage with the charged particle beam undergoing deflection thereof by the deflector; and
a processor configured to perform a process of obtaining a position of the mark,
wherein the processor is configured to control the stage, the charged particle optical system, and the detector such that a position of the first mark element is measured while two ends of the first mark element fall within a range of deflection by the deflector with respect to a first charged particle beam among the plurality of charged particle beams, and a position of the second mark element is measured while two ends of the second mark element fall within a range of deflection by the deflector with respect to a second charged particle beam, among the plurality of charged particle beams, closer to the second mark element than the first charged particle beam.