Power module production method, and power module produced thereby
There is provided a power module production method that is capable of stably producing a power module with highly reliable properties, and so forth. The power module production method produces a power module 1 by stacking a cooler 5 , an insulating resin sheet 4 , a heat sink block 3 , and a semiconductor chip 2 , wherein a first insulating resin sheet 41 , which forms a lower layer of the insulating resin sheet 4 , is first bonded to the cooler 5 by thermal compression. Next, with a second insulating resin sheet 42 , which forms an upper layer of the insulating resin sheet 4 , interposed between the first insulating resin sheet 41 and the heat sink block 3 , the second insulating resin sheet 42 is bonded to the first insulating resin sheet 41 by thermal compression, and the heat sink block 3 is bonded to the second insulating resin sheet 42 by thermal compression. The semiconductor chip 2 is then soldered onto the heat sink block 3 . Thus, bonding defects at the respective bonding interfaces are prevented, and dielectric breakdown of the insulating resin sheet 4 is prevented.
1. A power module production method for producing a power module by stacking a cooler, an insulating resin sheet, a heat sink block, and a semiconductor chip, the power module production method comprising:
a first thermal compression bonding step in which a first insulating resin sheet, which forms a lower layer of the insulating resin sheet, is bonded to the cooler by thermal compression;
a second the thermal compression bonding step in which a second insulating resin sheet, which forms an upper layer of the insulating resin sheet, is interposed between the first insulating resin sheet and the heat sink block, the second insulating resin sheet is bonded to the first insulating resin sheet by thermal compression, and the heat sink block is bonded to the second insulating resin sheet by thermal compression; and
a soldering step in which the semiconductor chip is soldered onto the heat sink block, wherein:
the first insulating resin sheet and the second insulating resin sheet each comprise a thermosetting resin material,
in the first thermal compression bonding step, heating is performed to a temperature at which the first insulating resin sheet thermally cures, and
in the second thermal compression bonding step, heating is performed to a temperature at which the second insulating resin sheet thermally cures.
2. The power module production method according to claim 1 , wherein the first insulating resin sheet has a size that is greater than that of the heat sink block, and a thickness that is equal to or greater than the thickness of the second insulating resin sheet.