Rinsing apparatus and rinsing method for polycrystalline silicon lump
A rinsing apparatus for polycrystalline silicon lump which is obtained by cutting or breaking a rod of polycrystalline silicon, including: a wash basket having a plurality of through holes, which carries the polycrystalline silicon lump; a wash tank in which the wash basket is provided therein, in which rinse water is continuously supplied from a water supply port which is arranged at a bottom part of the wash tank; an inner cage having a plurality of openings which is smaller than the through holes of the wash basket at a bottom part thereof, provided in the wash tank, in which the wash basket is stored therein; and a swing device holding and swinging the wash basket in the inner cage, and: an overflow part which recovers the rinse water overflowed from an upper portion of the wash tank is provided at the wash tank.
1. A rinsing apparatus for a polycrystalline silicon lump which is obtained by cutting or breaking a rod of polycrystalline silicon, comprising:
a wash basket having a plurality of through holes, and carrying the polycrystalline silicon lump;
a wash tank in which the wash basket is provided therein, and in which rinse water is continuously supplied from a water supply port which is arranged at a bottom part of the wash tank;
an inner cage having a plurality of openings which is smaller than the through holes of the wash basket at a bottom part thereof, provided in the wash tank by resting a handle formed at an upper end of the inner cage on an upper part of the wash tank so as to be held in a state of being hung in the wash tank, and in which the wash basket is stored therein; and
a swing device holding and swinging the wash basket in the inner cage, wherein
an overflow part which recovers the rinse water overflowed from an upper portion of the wash tank is provided at the wash tank.
2. The rinsing apparatus for a polycrystalline silicon lump according to claim 1 , wherein the swing device comprises a roof having a flow hole permitting the rinse water to pass through and covering an upper opening of the wash basket.
3. The rinsing apparatus for a polycrystalline silicon lump according to claim 2 , a gap in which the rinse water passes through is provided between the roof and the upper opening of the wash basket.
4. The rinsing apparatus for a polycrystalline silicon lump according to claim 1 , wherein the bottom part of the wash tank is inclined, and the water supply port is provided at a lowest part of the bottom part.
5. The rinsing apparatus for a polycrystalline silicon lump according to claim 1 , further comprising a baffle plate baffling an upward flow of the rinse water above the water supply port.
6. The rinsing apparatus for a polycrystalline silicon lump according to claim 1 , wherein the swing device is provided with a holding hand which holds a flange of an upper part of the wash basket, and an urethane plate which is in contact with the flange of the wash basket is attached to the holding hand.