Radiation-sensitive resin composition

1. A radiation-sensitive resin composition comprising:

a compound represented by a formula (I);

a first polymer that serves as a base resin; and

a second polymer that has a fluorine atom content higher than a fluorine atom content of the first polymer,

wherein

R 1 is a monovalent group that includes at least two groups of —CO—, —NH—, —S—, and —SO 2 —, the at least two groups being each identical or different, and is a group represented by a formula (a1), a group represented by a formula (a3), or both thereof,

-A-(CFR) a — is —CH 2 CH 2 CF 2 CF 2 — or —CH 2 CH 2 CH 2 CF 2 CF 2 —, and

M + is a monovalent cation,

wherein

X 1 to X 5 are each independently —CO—, —COO—, —OCO—, —O—CO—O—, —NHCO—, —CONH—, —NH—CO—O—, —O—CO—NH—, —NH—, —S—, —SO—, or —SO 2 —,

R 2 is a monovalent hydrocarbon group having 1 to 30 carbon atoms,

R 3 , R 5 , and R 6 are each independently a divalent hydrocarbon group having 1 to 30 carbon atoms, wherein some or all of hydrogen atoms of the monovalent hydrocarbon group represented by R 2 or the divalent hydrocarbon group represented by R 3 , R 5 , or R 6 are unsubstituted or substituted with a substituent,

Z is a group that has a heterocyclic structure taken together with —(X 3 —R 5 ) p —,

p is an integer from 1 to 3, and

r is 0 or 1,

in a case where a plurality of X 3 are present, each of the plurality of X 3 is either identical or different, and

in a case where a plurality of R 5 are present, each of the plurality of R 5 is either identical or different.

2. The radiation-sensitive resin composition according to claim 1 , wherein M + in the formula (I) is a sulfonium cation or an iodonium cation.

3. The radiation-sensitive resin composition according to claim 1 , wherein the first polymer comprises a structural unit represented by a formula (5),

wherein

R 14 is a hydrogen atom or a methyl group, and

R 15 , R 16 , and R 17 are each independently a linear or branched alkyl group having 1 to 4 carbon atoms or an alicyclic hydrocarbon group having 4 to 20 carbon atoms, or two of R 15 , R 16 , and R 17 taken together represent an alicyclic hydrocarbon group having 4 to 20 carbon atoms together with the carbon atom bonded to the two of R 15 , R 16 , and R 17 , and the other one of R 15 , R 16 , and R 17 is a linear or branched alkyl group having 1 to 4 carbon atoms or an alicyclic hydrocarbon group having 4 to 20 carbon atoms.

4. The radiation-sensitive resin composition according to claim 1 , wherein X 1 , X 3 , and X 4 are each independently —CO— or —COO—.

5. The radiation-sensitive resin composition according to claim 1 , wherein X 2 and X 5 are each —CO—.