Sputtering target, method for manufacturing the same, manufacturing semiconductor device
View Patent ↗A deposition technique for forming an oxynitride film is provided. A highly reliable semiconductor element is manufactured with the use of the oxynitride film. The oxynitride film is formed with the use of a sputtering target including an oxynitride containing indium, gallium, and zinc, which is obtained by sintering a mixture of at least one of indium nitride, gallium nitride, and zinc nitride as a raw material and at least one of indium oxide, gallium oxide, and zinc oxide in a nitrogen atmosphere. In this manner, the oxynitride film can contain nitrogen at a necessary concentration. The oxynitride film can be used for a gate, a source electrode, a drain electrode, or the like of a transistor.
1. A method for manufacturing a sputtering target including an oxynitride comprising indium, gallium, and zinc, the method comprising the steps of:
mixing at least one of indium nitride, gallium nitride, and zinc nitride and at least one of indium oxide, gallium oxide, and zinc oxide as a mixture; and
sintering the mixture in a gas atmosphere comprising nitrogen.
2. The method for manufacturing a sputtering target according to claim 1 , wherein a concentration of nitrogen in a sintered body of the oxynitride is 4 atomic % or more.
3. The method for manufacturing a sputtering target according to claim 1 , wherein a concentration of nitrogen in a sintered body of the oxynitride is 20 atomic % or more.
4. The method for manufacturing a sputtering target according to claim 1 , wherein a concentration of an alkali metal in a sintered body of the oxynitride is 5×10 16 atoms/cm 3 or lower.
5. The method for manufacturing a sputtering target according to claim 1 , wherein a concentration of hydrogen in a sintered body of the oxynitride is 1×10 16 atoms/cm 3 or lower.
6. The method for manufacturing a sputtering target according to claim 1 , wherein the oxynitride is an In—Ga—Zn—O-N-based compound.
7. The method for manufacturing a sputtering target according to claim 1 , wherein the gas atmosphere comprising the nitrogen is a nitrogen gas.
8. The method for manufacturing a sputtering target according to claim 1 , wherein the mixture is sintered while being pressed.
9. A method for manufacturing a sputtering target, comprising the steps of:
preparing a first material and a second material each comprising at least one of indium, gallium, and zinc;
oxidizing the first material in an oxygen atmosphere to form an oxide material;
nitriding the second material in a nitrogen atmosphere to form a nitride material;
mixing the oxide material and the nitride material to form a mixture; and
sintering the mixture to form a sintered body of an oxynitride,
wherein each of the first material and the second material is in a powder form,
wherein the oxide material comprises at least one of indium oxide, gallium oxide, and zinc oxide, and
wherein the nitride material comprises at least one of indium nitride, gallium nitride, and zinc nitride.
10. The method for manufacturing a sputtering target according to claim 9 , wherein a concentration of nitrogen in the sintered body of the oxynitride is 4 atomic % or more.
11. The method for manufacturing a sputtering target according to claim 9 , wherein a concentration of nitrogen in the sintered body of the oxynitride is 20 atomic % or more.
12. The method for manufacturing a sputtering target according to claim 9 , wherein a concentration of an alkali metal in the sintered body of the oxynitride is 5×10 16 atoms/cm 3 or lower.
13. The method for manufacturing a sputtering target according to claim 9 , wherein a concentration of hydrogen in the sintered body of the oxynitride is 1×10 16 atoms/cm 3 or lower.
14. The method for manufacturing a sputtering target according to claim 9 , wherein the oxynitride is an In—Ga—Zn—O-N-based compound.
15. The method for manufacturing a sputtering target according to claim 9 , wherein the step of sintering the mixture is performed in a nitrogen atmosphere.
16. The method for manufacturing a sputtering target according to claim 9 , wherein the mixture is sintered while being pressed.