IP Library › Granted Patent US 8,897,610
Granted Patent B2
US 8,897,610 · App. 13/972,817 · Granted Nov 25, 2014

Method of fabricating an optical-fiber-compatible sensor

Inventors: Onur Can Akkaya (Stanford, CA); Michel J. F. Digonnet (Palo Alto, CA); Onur Kilic (Mountain View, CA); Gordon S. Kino (Stanford, CA); Olav Solgaard (Stanford, CA)
Assignee: The Board of Trustees of the Leland Stanford Junior University
G01H9/004G02B2006/12138
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Quick Facts
Patent No.
US 8,897,610
App. No.
13/972,817
Granted
Nov 25, 2014
Kind
B2
Abstract

A method for fabricating a sensor is provided, with the sensor including a reflective element and an optical fiber positioned relative to the reflective element such that light emitted from the optical fiber is reflected by the reflective element and propagates in an optical cavity between the optical fiber and the reflective element. The method includes positioning an element within the optical cavity. The element has a coefficient of thermal expansion and a thickness that compensate a refractive index change with temperature of a medium within the optical cavity.

Claims (13)

1. A method of fabricating a sensor, the method comprising:

providing a movable element;

positioning an optical fiber relative to the movable element to form an optical cavity such that light propagates in the optical cavity between the optical fiber and the movable element and is reflected by the movable element, the optical cavity comprising a medium having a refractive index change with temperature; and

positioning an element within the optical cavity, the element having a coefficient of thermal expansion and a thickness that compensate the refractive index change with temperature.

2. The method of claim 1 , wherein the movable element comprises a reflective element and a diaphragm, the medium comprises water, and the element within the optical cavity comprises silica and has a thickness approximately equal to a distance between the optical fiber and the movable element.

3. The method of claim 2 , wherein the element within the optical cavity comprises the diaphragm.

4. The method of claim 1 , wherein the movable element comprises a reflective element and a diaphragm, the medium comprises water in a region between the optical fiber and the movable element, and the element within the optical cavity comprises silica and has a thickness approximately equal to a thickness of the region between the optical fiber and the movable element.

5. The method of claim 1 , wherein the element within the optical cavity comprises a portion of the optical fiber.

6. The method of claim 1 , wherein the element within the optical cavity is mechanically coupled to the optical fiber.

7. The method of claim 1 , wherein the optical fiber comprise a second reflective element, the second reflective element and the reflective element forming a Fabry-Perot cavity therebetween.

8. The method of claim 7 , wherein the element within the optical cavity is between the second reflective element and the reflective element.

9. The method of claim 1 wherein the sensor has a reduced sensitivity to temperature variations as compared to a sensor without the element within the optical cavity.

10. The method of claim 8 , wherein the optical cavity comprises a liquid, and the method further comprising positioning at least one gas bubble within a volume of the liquid to increase sensitivity.

Continuity (5)
Division 13047668 · Mar 14, 2011
Provisional Application 61314090 · Mar 15, 2010
Provisional Application 61331303 · May 4, 2010
Provisional Application 61382385 · Sep 13, 2010
Related Publication 20130340232A1 · Dec 26, 2013