IP Library Granted Patent US 8,899,291
Granted Patent B2
US 8,899,291 · App. 13/816,540 · Granted Dec 2, 2014

Laminating apparatus

Inventors: Ryoichi Yasumoto (Osaka, JP); Kazutoshi Iwata (Osaka, JP); Kinya Kodama (Annaka, JP); Grigoriy Basin (San Francisco, CA)
Assignees: Nichigo-Morton Co., Ltd.; Shin-Etsu Chemical Co., Ltd.
B32B37/1009B32B37/003B29C43/18H05K3/284B32B2457/08H05K2203/1311B32B2309/65B32B39/00H01L33/52B32B2309/68
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Quick Facts
Patent No.
US 8,899,291
App. No.
13/816,540
Granted
Dec 2, 2014
Kind
B2
Abstract

A laminating apparatus is provided which causes a resin film to completely conform to protruding and recessed portions of a substrate, and which makes the film thickness of the conforming resin film uniform on a stricter level. To this end, the laminating apparatus includes a laminating mechanism including: an enclosed space forming receiver capable of receiving a provisionally laminated body therein; and a pressure laminator for applying pressure to the provisionally laminated body in non-contacting relationship in an enclosed space formed by the enclosed space forming receiver to form an end laminated body from the provisionally laminated body.

Claims (32)

1. A laminating apparatus for a provisionally laminated body including a substrate having front and back surfaces at least one of which has protruding and recessed portions, and one of a first resin film and a second resin film attached to an uneven surface of the substrate, the second resin film including a support film, the laminating apparatus being configured to form an end laminated body including one of the first resin film and the second resin film conforming to the protruding and recessed portions of the substrate, the laminating apparatus comprising:

a first laminating mechanism including:

a first enclosed space forming receiver capable of receiving the provisionally laminated body therein;

a first depressurizer capable of placing a space between one of the first resin film and the second resin film and the substrate of the provisionally laminated body under a negative pressure in a first enclosed space formed by the first enclosed space forming receiver;

a first heater capable of heating the one of the first resin film and the second resin film of the provisionally laminated body; and

a first pressure laminator for laminating the one of the first resin film and the second resin film of the provisionally laminated body to protruding portions of the substrate to form an intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film, and

a second laminating mechanism including:

a second enclosed space forming receiver capable of receiving the intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film therein;

a second depressurizer capable of forming a depressurized enclosed space between the one of the first resin film and the second resin film and the substrate of the intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film under a negative pressure in a second enclosed space formed by the second enclosed space forming receiver;

a second heater capable of heating the one of the first resin film and the second resin film of the intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film such that the intermediate laminated body includes the depressurized enclosed space between the one of the first resin film and the second resin film and the substrate thereof; and

a second pressure laminator for applying pressure to the intermediate laminated body having the depressurized enclosed space between the one of the first resin film and the second resin film and the substrate thereof in a non-contacting relationship with the one of the first resin film and the second resin film in the second enclosed space formed by the second enclosed space forming receiver to form the end laminated body.

2. The laminating apparatus according to claim 1 , further comprising:

a first transporting mechanism for transporting the provisionally laminated body to the first laminating mechanism;

a second transporting mechanism for transporting to the second laminating mechanism the intermediate laminated body including the substrate integrated with one of the first resin film and the second resin film formed by the first laminating mechanism; and

a third transporting mechanism for transporting the end laminated body formed by the second laminating mechanism out of the second laminating mechanism.

3. The laminating apparatus according to claim 1 ,

wherein the second pressure laminator further includes a controller for controlling applied pressure.

4. The laminating apparatus according to claim 1 , further comprising

a support film remover for removing the support film from the second resin film.

5. The laminating apparatus according to claim 1 , comprising:

a cutter for cutting one of the first resin film and the second resin film to a predetermined size; and

a precurer for precuring one of the first resin film and the second resin film.

6. A laminating apparatus for a provisionally laminated body including a substrate having front and back surfaces at least one of which has protruding and recessed portions, and one of a first resin film and a second resin film attached to an uneven surface of the substrate, the second resin film including a support film, the laminating apparatus being configured to form an end laminated body including one of the first resin film and the second resin film conforming to the protruding and recessed portions of the substrate, the laminating apparatus comprising:

a first laminating mechanism including:

a first enclosed space forming receiver capable of receiving the provisionally laminated body therein;

a first depressurizer capable of placing a space between one of the first resin film and the second resin film and the substrate of the provisionally laminated body under a negative pressure in a first enclosed space formed by the first enclosed space forming receiver;

a first heater capable of heating the one of the first resin film and the second resin film of the provisionally laminated body; and

a first pressure laminator for laminating the one of the first resin film and the second resin film of the provisionally laminated body to protruding portions of the substrate to form an intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film, and

a second laminating mechanism including:

a second enclosed space forming receiver defining a second enclosed space and capable of receiving the intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film therein is provided with an upper plate portion and a lower plate portion;

a second depressurizer capable of forming a depressurized enclosed space between the one of the first resin film and the second resin film and the substrate of the intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film under a negative pressure in the second enclosed space;

a second heater disposed within a recess of the lower plate portion such that a recessed channel defined in an upper surface of the lower plate portion surrounds the second heater, and capable of heating the one of the first resin film and the second resin film of the intermediate laminated body including the substrate integrated with the one of the first resin film and the second resin film such that the intermediate laminated body includes the depressurized enclosed space between the one of the first resin film and the second resin film and the substrate thereof; and a second pressure laminator for applying pressure to the intermediate laminated body having the depressurized enclosed space between the one of the first resin film and the second resin film and the substrate thereof in a non-contacting relationship with one of the first resin film and the second resin film in the second enclosed space to form the end laminated body.

Assignments (3)
CHANGE OF NAME Recorded Jul 13, 2015
From: YASUMOTO, RYOICHI; IWATA, KAZUTOSHI; KODAMA, KINYA; BASIN, GRIGORIY
To: NIKKO-MATERIALS CO., LTD.; SHIN-ETSU CHEMICAL CO., LTD.
Reel/Frame 036071/0979 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ADDRESS OF THE FIRST ASSIGNEE: NICHIGO-MORTON CO., LTD.,(2-4, KOMATSUBARA-CHO, KITA-KU, OSAKA-SHI, OSAKA 530-0018 JAPAN) PREVIOUSLY RECORDED ON REEL 029795 FRAME 0642. ASSIGNOR(S) HEREBY CONFIRMS THE ADDRESS OF THE FIRST ASSIGNEE: NICHIGO-MORTON CO., LTD.,(1-16-3, NAKAMACHI, MACHIDA-SHI, TOKYO,194-0021 JAPAN). Recorded Oct 28, 2013
From: YASUMOTO, RYOICHI; IWATA, KAZUTOSHI; BASIN, GRIGORIY; KODAMA, KINYA
To: NICHIGO-MORTON CO., LTD.,; SHIN-ETSU CHEMICAL CO., LTD.,
Reel/Frame 031506/0149 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 12, 2013
From: YASUMOTO, RYOICHI; IWATA, KAZUTOSHI; BASIN, GRIGORIY; KODAMA, KINYA
To: NICHIGO-MORTON CO., LTD.,; SHIN-ETSU CHEMICAL CO., LTD.,
Reel/Frame 029795/0642 →
Priority Claims (1)
JP 2010-185418 · Aug 20, 2010 · national
Continuity (1)
Related Publication 20130133836A1 · May 30, 2013