High performance glass-based 60 ghz / mm-wave phased array antennas and methods of making same

1. A phased-array antenna (PAA) substrate, comprising:

a first dielectric layer containing a plurality of emitter traces;

a second dielectric layer mated to the first dielectric layer, wherein the second dielectric layer is a glass and supports an array of planar antenna elements disposed on a top surface thereof, and wherein the second dielectric layer includes an array of cavities that corresponds to the array of planar antenna elements, wherein each antenna element is vertically aligned with a corresponding cavity in the second dielectric layer.

2. The PAA substrate of claim 1 , wherein the first dielectric layer has a higher dielectric constant than the second dielectric layer.

3. The PAA substrate of claim 1 , wherein each planar antenna element has an area, and wherein each corresponding cavity has a footprint that is smaller than each corresponding planar antenna element area.

4. The PAA substrate of claim 1 , wherein each planar antenna element has an area, and wherein each corresponding cavity has a footprint that is equal to each corresponding planar antenna element area.

5. The PAA substrate of claim 1 , wherein each planar antenna element has an area, and wherein each corresponding cavity has a footprint that is larger than each corresponding antenna element area.

6. The PAA substrate of claim 1 , wherein each planar antenna element is covered on a bottom surface thereof with the second dielectric layer.

7. The PAA substrate of claim 1 , wherein each planar antenna element is exposed on a bottom surface thereof by a corresponding cavity.

8. The PAA substrate of claim 1 , wherein each planar antenna element is disposed within a corresponding cavity and covered on a top surface thereof with the second dielectric layer.

9. An apparatus, comprising:

a die including a through-silicon via and a radio frequency integrated circuit (TSV RFIC die); and

a phased-array antenna (PAA) substrate vertically integrated with the TSV RFIC, wherein the PAA substrate includes a plurality of antenna elements, each of which is coupled to the TSV RFIC through a plurality of TSVs, and each of which is disposed above a cavity.

10. The apparatus of claim 9 , wherein each antenna element has an area, and wherein the cavities have a footprint that is smaller than the antenna element area.

11. The apparatus of claim 9 , wherein each antenna element has an area, and wherein the cavities have a footprint that is equal to the antenna element area.

12. The apparatus of claim 9 , wherein each antenna element has an area, and wherein the cavities each have a footprint that is larger than the antenna element area.

13. The apparatus of claim 9 , wherein the PAA substrate includes a first dielectric that supports at least one trace, wherein the PAA substrate also includes a glass second dielectric that supports the antenna elements, and wherein the cavities are disposed in the second dielectric.

14. The apparatus of claim 9 , wherein the PAA substrate includes a first dielectric that supports at least one trace, wherein the PAA substrate also includes a glass second dielectric that supports the antenna elements, wherein the cavities are disposed in the second dielectric, and wherein each antenna element is covered on a surface with the second dielectric.

15. The apparatus of claim 9 , wherein the PAA substrate includes a first dielectric that supports at least one trace, wherein the PAA substrate also includes a glass second dielectric that supports the antenna elements, wherein the cavities are disposed in the second dielectric, and, wherein each antenna element is exposed to a corresponding of the cavities.

16. The apparatus of claim 9 , wherein the PAA substrate includes a first dielectric that supports at least one trace, wherein the PAA substrate also includes a glass second dielectric that supports the antenna elements, wherein the cavities are disposed in the second dielectric, and, wherein each antenna element is disposed inside a corresponding of the cavities.

17. The apparatus of claim 9 , further including an emitter trace disposed at the first dielectric for each antenna element, wherein the first dielectric is positioned between each emitter trace and a corresponding cavity in the second dielectric.

18. The apparatus of claim 9 , further including an emitter trace disposed at the first dielectric for each antenna element, wherein the first dielectric is positioned between each emitter trace and a corresponding cavity in the second dielectric, and wherein each emitter trace is coupled to a corresponding antenna element with a via contact.

19. The apparatus of claim 9 , further including a first-level interconnect substrate onto which the TSV RFIC is mounted.

20. The apparatus of claim 9 , further including a first-level interconnect substrate onto which the TSV RFIC is mounted, and wherein the first-level interconnect substrate includes at least one passive device embedded therein that functions with the TSV RFIC.

21. The apparatus of claim 9 , further including:

a first-level interconnect substrate onto which the TSV RFIC is mounted, wherein the TSV RFIC includes an active surface and a backside surface;

a plurality of electrical bumps disposed between the active surface and the first-level interconnect substrate, wherein the first-level interconnect substrate is a direct chip-attach (DCA) substrate; and

a plurality of backside bumps disposed between the backside surface and the PAA substrate.

22. The apparatus of claim 9 , wherein the plurality of antenna elements in the PAA substrate is coupled to the TSV RFIC through inductive-coupling apertures in the PAA substrate.

23. The apparatus of claim 9 , wherein the plurality of antenna elements in the PAA substrate is coupled to the TSV RFIC through via-coupling in the PAA substrate.

24. The apparatus of claim 9 , further including:

a first-level interconnect substrate onto which the TSV RFIC is mounted, wherein the PAA substrate includes an embedded ground plane coupled to the plurality of antenna elements and also coupled to the TSV RFIC; and

at least one dummy bump disposed between the PAA substrate and the substrate onto which the TSV RFIC is mounted.

25. The apparatus of claim 9 , further including:

a through-silicon via digital processor die (TSV DP) coupled to the TSV RFIC through at least one TSV in the TSV RFIC and at least one TSV in the TSV DP, and wherein the TSV DP and the TSV RFIC are vertically integrated below the PAA substrate;

a first-level interconnect substrate onto which the TSV DP is mounted, wherein the PAA substrate includes an embedded ground plane coupled to the plurality of antenna elements and also coupled to the TSV RFIC; and

at least one dummy bump disposed between the PAA substrate and the substrate onto which the TSV RFIC is mounted.

26. The apparatus of claim 9 , further including:

a through-silicon via memory die coupled to the TSV RFIC through at least one TSV in the TSV RFIC and at least one TSV in the TSV memory die, and wherein the TSV memory die and the TSV RFIC are vertically integrated below the PAA substrate; and

a first-level interconnect substrate onto which the TSV memory die is mounted, and wherein the first-level interconnect substrate includes at least one passive device embedded therein that functions with the TSV RFIC.