Room temperature bonding apparatus
A room temperature bonding apparatus according to the present invention is provided with a load lock chamber having an internal space which is pressure-reduced; and a cartridge arranged in the load lock chamber. The cartridge includes an island portion formed to contact a substrate when the substrate is put on the cartridge. A flow passage is formed for the island portion to connect a space between the cartridge and the substrate to outside when the substrate is put on the cartridge. Therefore, in the room temperature bonding apparatus can prevent making the substrate is moved to the cartridge due to gas when the internal space is pressure-reduced.
1. A room temperature bonding apparatus comprising:
a load lock chamber provided with a cartridge having a substrate put thereon and having an internal space which is pressure-reduced;
a bonding chamber comprising a lower-side stage, and an upper-side stage and a bonding mechanism, wherein said upper-side stage holds another substrate; and
a conveyer unit which conveys said cartridge having said substrate from said load lock chamber to said lower-side stage in said bonding chamber, when said bonding chamber is in a pressure-reduced state, such that said bonding mechanism bonds said substrate and said another substrate in said bonding chamber through a pressure welding process,
wherein said cartridge comprises a plurality of island portions and a flow passage extending between said plurality of island portions, each island portion having a flat surface, such that the plurality of island portions makes contact with substantially an entire surface of one side of said substrate when said substrate is put on said cartridge, and
wherein the flow passage connects a space between said cartridge and said substrate to an outside of said space when said substrate is put on said cartridge.
2. The room temperature bonding apparatus according to claim 1 , wherein said cartridge has a flange, and said conveyer unit holds said cartridge by supporting a lower surface of said flange.
3. The room temperature bonding apparatus according to claim 2 , wherein a hand positioning section is provided for said flange of said cartridge, and
wherein a hand of said conveyer unit has another hand positioning section configured to engage with said hand positioning section when said cartridge is conveyed.
4. The room temperature bonding apparatus according to claim 3 , wherein said hand positioning section comprises a pin, and said another hand positioning section comprises a notch.
5. The room temperature bonding apparatus according to claim 1 ,
wherein said cartridge has a stage positioning section, and
wherein said lower-side stage has another stage positioning section configured to engage with said stage positioning section when said lower-side stage holds said cartridge.
6. The room temperature bonding apparatus according to claim 5 , wherein said stage positioning section comprises holes, and said another stage positioning section comprises prominences configured to engage with said holes.
7. The room temperature bonding apparatus according to claim 5 , further comprising:
an imaging unit; and
an alignment unit,
wherein an alignment hole is formed in said cartridge,
wherein said imaging unit takes an image of said substrate through said alignment hole when said lower-side stage holds said cartridge in a state that said substrate is put on said cartridge, and
wherein said alignment unit drives said lower-side stage based on said image.
8. The room temperature bonding apparatus according to claim 7 , wherein said flow passage is a ditch formed in the island portion.
9. The room temperature bonding apparatus according to claim 1 , wherein said cartridge has a plurality of substrate positioning pins, and
wherein said plurality of substrate positioning pins are arranged such that an outer circumferential edge of said substrate contacts all of said plurality of substrate positioning pins when said substrate is put on said cartridge.
10. The room temperature bonding apparatus according to claim 9 , wherein a top surface of each of said plurality of substrate positioning pins has a height longer than a lower surface of said substrate and shorter than an upper surface of said substrate, when said substrate is put on said cartridge, said upper surface being a surface opposite to the lower surface.
11. The room temperature bonding apparatus according to claim 1 , wherein said island portion contacts a peripheral portion of the surface on one side of said substrate.