Semiconductor device having a diamond substrate heat spreader
In accordance with one or more embodiments, a semiconductor device comprises a semiconductor die having a heat region disposed on at least one portion of the semiconductor die, and a diamond substrate disposed proximate to the semiconductor die, wherein the diamond substrate is capable of dissipating heat from the diamond substrate via at least one or more bumps coupling the diamond substrate to the heat region of the semiconductor die.
1. A semiconductor device, comprising:
a semiconductor die having a heat region disposed on at least one portion of the semiconductor die, the semiconductor die comprising a source contact region and a gate contact region;
a diamond substrate disposed proximate to the semiconductor die; and
an electrically conductive layer formed and patterned on the diamond substrate, wherein the electrically conductive layer comprises two regions physically separate from one another via a gap between the two regions and having one or more openings, in addition to the gap, formed in the region coupled to the gate region of the semiconductor die and wherein the diamond substrate is capable of dissipating heat from the diamond substrate via at least one or more bumps coupling the diamond substrate to the heat region of the semiconductor die;
wherein a thickness of the diamond substrate is selected to meet a thermal specification of the semiconductor die.
2. The semiconductor device of claim 1 , wherein at least one or more additional bumps electrically couple the diamond substrate to a contact region of the semiconductor device at a location outside of the heat region.
3. The semiconductor device of claim 1 , wherein at least one or more vias electrically couple the diamond substrate to a contact region of the semiconductor device at a location outside of the heat region.
4. The semiconductor device of claim 1 , wherein the semiconductor die comprises at least one or more contact regions, the contact regions comprising an electrically conductive adhesion layer for adhering to the diamond substrate, an electrically conductive barrier layer, or an electrically conductive layer for physically coupling to the at least one or more bumps, or combinations thereof.
5. The semiconductor device of claim 1 , wherein at least one or more of the bumps comprise gold.
6. The semiconductor device of claim 1 , wherein at least one or more of the bumps comprise copper.
7. The semiconductor device of claim 1 , wherein the diamond substrate is separated from the semiconductor die by a distance sufficient to reduce or prevent arch over at a selected operating voltage.
8. The semiconductor device of claim 1 , the semiconductor die comprising at least one transistor disposed in the heat region and having a channel region, wherein a portion of the diamond substrate contacts the channel region of the die within about a few microns from the channel region of the transistor to reduce heat flow through the transistor.
9. The semiconductor device of claim 1 , wherein the semiconductor die comprises two or more mesh transistor cells, one or more of the mesh transistor cells comprising a metal heat dissipation region coupled to the diamond substrate.
10. The semiconductor device of claim 1 , wherein the semiconductor die comprises a dielectric platform region disposed adjacent to at least a portion of the heat region.
11. The semiconductor device of claim 1 , wherein the diamond substrate is capable of at least partially reducing stress on the semiconductor die.
12. The semiconductor device of claim 1 , further comprising a flange coupled to the diamond substrate to dissipate heat from the heat region of the semiconductor die to a heat sink via the diamond substrate and the flange.
13. The semiconductor device of claim 1 , further comprising a flange coupled to the diamond substrate to dissipate heat from the heat region of the semiconductor die to a heat sink via the diamond substrate and the flange, wherein the diamond substrate is coupled to the flange via a gold-germanium layer, a solder layer, or a conductive epoxy layer, or combinations thereof.
14. The semiconductor device of claim 1 , further comprising:
a printed circuit board; and
a heat sink coupled to the circuit board;
wherein the diamond substrate is coupled to the heat sink and wherein the semiconductor die is coupled to the printed circuit board.
15. The semiconductor device of claim 1 , further comprising:
a printed circuit board;
a heat sink coupled to the circuit board, wherein the diamond substrate is coupled to the heat sink; and
a shielding cap at least partially covering the semiconductor die and being coupled to the printed circuit board.