Thin film transistor and display device
View Patent ↗The present invention provides a technique by which a component forming a display device, such as a wiring can be formed with good adhesion. In the invention, a component forming a thin film transistor, a display device, or the like is formed with a material which is the same as at least one of the substances forming the formation subject surface added (mixed); thus, adhesion between the component and the formation subject is improved. An insulating layer formed over the component is formed with a laminate of a first insulating layer containing an organic material and a second insulating layer containing an inorganic material; thus, the insulating layer sufficiently covers irregularities on the surface of the component, and is also dense enough so as to be reliable as an insulating layer.
1. A display device comprising:
a substrate;
a gate electrode comprising a particle of an oxide on the substrate, wherein the particle of an oxide contains a material which is contained in the substrate;
a first insulating layer containing an organic material over the gate electrode;
a second insulating layer containing an inorganic material over the first insulating layer;
a semiconductor layer over the second insulating layer; and
a source electrode layer and a drain electrode layer over and in contact with the semiconductor layer and the second insulating layer,
wherein the source electrode layer and the drain electrode layer comprise the particle of an oxide.
2. The display device according to claim 1 , wherein the first insulating layer containing the organic material includes a siloxane polymer.
3. The display device according to claim 1 , wherein the second insulating layer containing the inorganic material includes silicon nitride.
4. The display device according to claim 1 , further comprising:
an electrode layer which is electrically connected to the source electrode layer and the drain electrode layer.
5. The display device according to claim 1 , wherein the first insulating layer containing the organic material includes one of epoxy resin, phenol resin, novolac resin, acrylic resin, melamine resin, urethane resin, acrylic acid, methacrylic acid, polyimide, aromatic polyamide, and polybenzimidazole.
6. The display device according to claim 1 , wherein the particle of an oxide is in contact with the substrate.
7. The display device according to claim 1 , wherein the gate electrode has a rounded corner.
8. The display device according to claim 1 , wherein the particle of an oxide has a size of 100 nm or less.
9. The display device according to claim 1 , wherein the particle of an oxide contains silicon oxide.
10. A display device comprising:
a substrate;
a gate electrode comprising a particle of a nitride on the substrate, wherein the particle of a nitride contains a material which is contained in the substrate;
a first insulating layer containing an organic material over the gate electrode;
a second insulating layer containing an inorganic material over the first insulating layer;
a semiconductor layer over the second insulating layer; and
a source electrode layer and a drain electrode layer over and in contact with the semiconductor layer and the second insulating layer,
wherein the source electrode layer and the drain electrode layer comprise the particle of a nitride.
11. The display device according to claim 10 , wherein the first insulating layer containing the organic material includes a siloxane polymer.
12. The display device according to claim 10 , wherein the second insulating layer containing the inorganic material includes silicon nitride.
13. The display device according to claim 10 , further comprising:
an electrode layer which is electrically connected to the source electrode layer and the drain electrode layer.
14. The display device according to claim 10 , wherein the first insulating layer containing the organic material includes one of epoxy resin, phenol resin, novolac resin, acrylic resin, melamine resin, urethane resin, acrylic acid, methacrylic acid, polyimide, aromatic polyamide, and polybenzimidazole.
15. The display device according to claim 10 , wherein the particle of a nitride is in contact with the substrate.
16. The display device according to claim 10 , wherein the gate electrode has a rounded corner.
17. The display device according to claim 10 , wherein the particle of a nitride has a size of 100 nm or less.