Porous capacitor
One object is to provide a porous capacitor having increased insulation reliability. In accordance with one aspect, the porous capacitor includes: a first conductor layer and a second conductor layer opposed to each other at a predetermined distance; a dielectric layer made of an oxidized valve metal and disposed between the first conductor layer and the second conductor layer; a large number of holes formed through the dielectric layer and oriented substantially orthogonal to the first conductor layer and the second conductor layer; and first electrodes and second electrodes formed of a conductive material filled in the holes; and insulation parts insulating the first electrodes from the second conductor layer and insulating the second electrodes from the first conductor layer. The thicknesses of the first conductor layer and the second conductor layer are equal to or greater than half of the inner diameter of the holes.
1. A porous capacitor comprising:
a first conductor layer having a first thickness;
a second conductor layer opposed to the first conductor layer at a predetermined distance;
a dielectric layer made of an oxidized valve metal and disposed between the first conductor layer and the second conductor layer, the dielectric layer having formed therein a large number of holes and oriented substantially orthogonal to the first conductor layer and the second conductor layer;
first electrodes formed of a conductive material filled in at least a part of the large number of holes, the first electrodes being electrically connected to the first conductor layer, while insulated from the second conductor layer; and
second electrodes formed of a conductive material filled in at least a part of the large number of holes, the second electrodes being electrically connected to the second conductor layer, while insulated from the first conductor layer,
wherein the first thickness is equal to or greater than half of the inner diameter of the holes and smaller than the inner diameter of the holes, and
wherein the first conductor layer and/or the second conductor layer is formed of Ti, Ta, Mo or W.
2. The porous capacitor of claim 1 , wherein the second conductor layer has a second thickness equal to or greater than half of the inner diameter of the holes.
3. The porous capacitor of claim 1 , wherein the first conductor layer and/or the second conductor layer is formed of Ti, Ta, Cr, Mo, W, or Pt.
4. The porous capacitor of claim 1 wherein the first conductor layer and/or the second conductor layer is formed of Ti, Ta, or Pt.