Cell design for embedded thermally-assisted MRAM
View Patent ↗A thermally assisted magnetoresistive random access memory cell, a corresponding array, and a method for fabricating the array. An example cell includes a first metal layer, a second metal layer, an interlayer, a first magnetic stack, and a first non-magnetic via. The first metal layer includes a pad and a first metal line, with the pad not in direct contact with the first metal line. The second metal layer includes a second metal line and a metal strap. The second metal line is perpendicular to the first metal line and not in contact with the metal strap. The interlayer is located between the first and second metal layers. The first metal line is not in direct contact with the interlayer. The first magnetic stack is in direct contact with the interlayer and the metal strap. The first non-magnetic via is in direct contact with the pad and the metal strap.
1. A thermally assisted magnetoresistive random access memory (MRAM) cell comprising:
a first metal layer including a pad and a first metal line, wherein the pad is not in direct contact with the first metal line;
a second metal layer including a second metal line and a metal strap, wherein the second metal line is not in direct contact with the metal strap, and the second metal line is perpendicular to the first metal line;
an interlayer between the first metal layer and the second metal layer, wherein the first metal line is not in direct contact with the interlayer;
a first magnetic stack in direct contact with both the interlayer and the metal strap; and
a first non-magnetic via in direct contact with both the pad and the metal strap.
2. The thermally assisted MRAM cell of claim 1 , further comprising a second magnetic stack, wherein the second magnetic stack is in direct contact with both the interlayer and the second metal line.
3. The thermally assisted MRAM cell of claim 2 , wherein the first magnetic stack and the second magnetic stack contain identical layers.
4. The thermally assisted MRAM cell of claim 2 , wherein the second magnetic stack has different dimensions than the first magnetic stack.
5. The thermally assisted MRAM cell of claim 2 , wherein the first magnetic stack has a cross-section with an area measuring between 100 square nanometers and 250,000 square nanometers.
6. The thermally assisted MRAM cell of claim 1 , further comprising a second non-magnetic via, wherein the second non-magnetic via is in direct contact with both the interlayer and the second metal line.
7. The thermally assisted MRAM cell of claim 1 , wherein the first metal line is parallel to the pad.
8. The thermally assisted MRAM cell of claim 1 , wherein the second metal line is parallel to the metal strap.
9. The thermally assisted MRAM cell of claim 1 , wherein the interlayer is an electric conductor.
10. The thermally assisted MRAM cell of claim 1 , wherein the interlayer is substantially T-shaped.
11. The thermally assisted MRAM cell of claim 10 , wherein a bar of the interlayer is parallel to the second metal line.
12. An array of thermally assisted magnetoresistive random access memory (MRAM) cells, the array comprising:
a first metal layer including a plurality of pads and a plurality of first metal lines, wherein none of the plurality of pads are in direct contact with any of the plurality of first metal lines;
a second metal layer including a plurality of second metal lines and a plurality of metal straps, wherein none of the plurality of second metal lines are in direct contact with any of the plurality of metal straps, and the plurality of second metal lines are perpendicular to the plurality of first metal lines;
an interlayer between the first metal layer and the second metal layer, wherein none of the first metal lines are in direct contact with the interlayer;
a plurality of first magnetic stacks in direct contact with the interlayer and the metal straps; and
a plurality of first vias in direct contact with the pads and the metal straps.
13. The array of claim 12 , wherein the interlayer is comb-shaped.
14. The array of claim 13 , wherein the interlayer contains a plurality of teeth, and the plurality of teeth are aligned parallel to the plurality of second metal lines.
15. The array of claim 12 , further comprising a plurality of second magnetic stacks in direct contact with both the interlayer and the second metal lines, the second magnetic stacks having different dimensions than the first magnetic stacks.
16. The array of claim 12 , further comprising a plurality of second vias in direct contact with both the interlayer and the second metal line.
17. The array of claim 12 , wherein the plurality of pads are not in direct contact with each other.
18. The array of claim 12 , wherein the plurality of metal straps are not in direct contact with each other.