Semiconductor process
First, a substrate with a recess is provided in a semiconductor process. Second, an embedded SiGe layer is formed in the substrate. The embedded SiGe layer includes an epitaxial SiGe material which fills up the recess. Then, a pre-amorphization implant (PAI) procedure is carried out on the embedded SiGe layer to form an amorphous region. Next, a source/drain implanting procedure is carried out on the embedded SiGe layer to form a source doping region and a drain doping region. Later, a source/drain annealing procedure is carried out to form a source and a drain in the substrate. At least one of the pre-amorphization implant procedure and the source/drain implanting procedure is carried out in a cryogenic procedure below −30° C.
1. A semiconductor process, comprising:
providing a substrate with at least one recess;
forming an embedded semiconductive epitaxial layer comprising an epitaxial SiGe material which fills up said recess in said substrate;
performing a pre-amorphization implant (PAI) procedure on said embedded semiconductive epitaxial layer to form an amorphous region;
after the pre-amorphization implant procedure, performing a source/drain implanting procedure on said embedded semiconductive epitaxial layer to form a source doping region and a drain doping region; and
performing a source/drain annealing procedure to form a source and a drain in said substrate, wherein at least one of said pre-amorphization implant procedure and said source/drain implanting procedure is performed in a cryogenic procedure below −30° C.
2. The semiconductor process of claim 1 , wherein said embedded semiconductive epitaxial layer comprises a plurality of said epitaxial SiGe materials of different concentrations.
3. The semiconductor process of claim 2 , wherein said pre-amorphization implant (PAI) procedure is performed to reach different depths in the embedded semiconductive epitaxial layer so that different regions in said embedded semiconductive epitaxial layer are selectively implanted.
4. The semiconductor process of claim 1 , wherein one of a tetra-valent element and Xe is used in said pre-amorphization implant (PAI) procedure.
5. The semiconductor process of claim 1 , wherein an energy of 5KeV to 30 KeV is used in said pre-amorphization implant (PAI) procedure.
6. The semiconductor process of claim 1 , wherein said embedded semiconductive epitaxial layer is free of dislocations after said pre-amorphization implant (PAI) procedure.
7. A semiconductor process, comprising:
providing a substrate with at least one recess;
forming an embedded semiconductive epitaxial layer comprising an epitaxial SiGe material which fills up said recess in said substrate, wherein said epitaxial SiGe material comprises a bulk layer in the middle of the recess and a cap layer covering said bulk layer, and said bulk layer has concentration of Ge of higher than said cap layer has;
performing a pre-amorphization implant (PAI) procedure on said embedded semiconductive epitaxial layer to form an amorphous region, wherein said pre-amorphization implant procedure is performed in a cryogenic procedure below −30° C., and said pre-amorphization implant (PAI) procedure is performed to reach different depths in said embedded semiconductive epitaxial layer so that different regions in said embedded semiconductive epitaxial layer are selectively implanted;
forming a strained layer to cover said amorphous region; and
performing an annealing procedure to form a stress memory layer adjacent to said amorphous region.
8. The semiconductor process of claim 7 , further comprising:
performing a source/drain implanting procedure on said embedded semiconductive epitaxial layer after said pre-amorphization implant (PAI) procedure to form a source doping region and a drain doping region, wherein said source/drain implanting procedure is performed in a cryogenic procedure below −30° C.
9. The semiconductor process of claim 8 , wherein said annealing procedure forms a source and a drain at the same time.
10. The semiconductor process of claim 7 , further comprising:
removing said strained layer after said annealing procedure.
11. The semiconductor process of claim 7 , wherein one of a tetra-valent element and Xe is used in said pre-amorphization implant (PAI) procedure.
12. The semiconductor process of claim 7 , wherein an energy of 5KeV to 30 KeV is used in said pre-amorphization implant (PAI) procedure.
13. The semiconductor process of claim 7 , wherein said embedded semiconductive epitaxial layer is free of dislocations after said pre-amorphization implant (PAI) procedure.
14. The semiconductor process of claim 7 , wherein said pre-amorphization implant (PAI) procedure is performed to reach different depths in the embedded semiconductive epitaxial layer so that different regions in said embedded semiconductive epitaxial layer are selectively implanted.
15. A semiconductor process, comprising:
providing a substrate with at least one recess;
forming an embedded semiconductive epitaxial layer comprising an epitaxial SiGe material which fills up said recess in said substrate;
performing a pre-amorphization implant (PAI) procedure on said embedded semiconductive epitaxial layer to form an amorphous region wherein said pre-amorphization implant (PAI) procedure is performed in a cryogenic procedure below −30° C.;
performing a source/drain implanting procedure on said embedded semiconductive epitaxial layer to form a source doping region and a drain doping region, wherein said source/drain implanting procedure is performed in a cryogenic procedure below −30° C.; and
performing a source/drain annealing procedure to form a source and a drain in said substrate.
16. The semiconductor process of claim 15 , wherein said embedded semiconductive epitaxial layer comprises a plurality of said epitaxial SiGe materials of different concentrations.
17. The semiconductor process of claim 15 , wherein no pre-amorphization implant (PAI) procedure is performed in said cryogenic procedure.
18. The semiconductor process of claim 15 , wherein a dopant in said source/drain implanting procedure on said embedded semiconductive epitaxial layer is selected from a group consisting of boron ions, boron fluoride ions, and boron cluster ions.