Semiconductor device with damascene bit line and method for fabricating the same
A semiconductor device includes a substrate having a plurality of contact surfaces, an interlayer dielectric layer formed over the substrate and having a first open portion which exposes a part of the contact surfaces and a second open portion which exposes the other contact surfaces, a storage node contact (SNC) plug filling the first open portion, and a damascene structure filing the second open portion and including a bit line, a spacer formed on both sidewalls of the bit line, a capping layer formed over the bit line and the spacer, and an air gap formed between the bit line and the spacer. The bit line includes a conductive material of which the volume is contracted by a heat treatment to form the air gap.
1. A semiconductor device comprising:
a substrate having a plurality of contact surfaces;
an interlayer dielectric layer formed over the substrate and having a first open portion which exposes a part of the contact surfaces and a second open portion which exposes the other contact surfaces;
a storage node contact (SNC) plug filling the first open portion; and
a damascene structure filing the second open portion and comprising a bit line, a spacer formed on both sidewalls of the bit line, a capping layer formed over the bit line and the spacer, and an air gap, wherein the air gap is formed between the bit line and the spacer, and formed at the entire interface between the capping layer and the bit line.
2. The semiconductor device of claim 1 , wherein the bit line comprises a conductive material of which the volume is contracted by a heat treatment to form the air gap.
3. The semiconductor device of claim 2 , wherein the conductive material comprises at least one selected from the group consisting of titanium nitride, tungsten nitride, and tungsten.
4. The semiconductor device of claim 2 , further comprising a buried gate formed, in the substrate, between the contact surfaces.
5. The semiconductor device of claim 1 , wherein the second open portion has a line shape to expose a first portion between two adjacent contact surfaces among the other contact surfaces, and
the air gap surrounds the bit line in a region overlapping with the first portion.