Semiconductor device
A source region and a drain region are disposed in a substrate. A gate insulating film is disposed on the substrate. A gate electrode is disposed on the gate insulating film. The gate electrode may include a first gate portion adjacent to the source region and a second gate portion adjacent to the drain region. The first and second gate portions have different work functions from each other.
1. A semiconductor device comprising:
a source region and a drain region disposed in a substrate;
a drift region disposed adjacent to the drain region;
a gate insulating film disposed on the substrate;
an impurity region disposed in the gate insulting film, wherein the impurity region overlaps the drift region; and
a gate electrode disposed on the gate insulating film,
wherein the gate electrode comprises a first gate portion adjacent to the source region, a second gate portion adjacent to the drain region, and a third gate portion on the first and the second gate portions, wherein a thickness of the third gate portion is greater than a thickness of the first and second gate portions,
wherein the first gate portion and second gate portion each have different work functions,
wherein the first and second gate portions include a metal and the third gate portion includes a poly silicon.
2. The semiconductor device of claim 1 , wherein the first gate portion is in direct contact with the second gate portion.
3. The semiconductor device of claim 1 , wherein the substrate comprises:
a first well region having a first well region conductivity type and disposed adjacent to the source region, the source region having a source region conductivity type,
the drift region having a drift region conductivity type, and the drain region having a drain region conductivity type,
wherein the first well region conductivity type is different from each of the source region conductivity type and the drain region conductivity type; and the drift region conductivity type is of the same conductivity type as each of the source region conductivity type and the drain region conductivity type.
4. The semiconductor device of claim 3 , wherein the first well region conductivity type is a p-type, and wherein the drift region conductivity type, the source region conductivity type and the drain region conductivity type are each an n-type; and wherein the work function of the first gate portion is lower than the work function of the second gate portion.
5. The semiconductor device of claim 3 , wherein the first well region conductivity type is an n-type, wherein the drift region conductivity type, the source region conductivity type and the drain region a conductivity type are each a p-type and wherein the first gate portion has a first work function and the second gate portion has a second work function; the first work function being higher than the second work function.
6. The semiconductor device of claim 5 , further comprising a deep well under the drift region having a deep well conductivity type, wherein the deep well conductivity type is an n-type.
7. The semiconductor device of claim 3 , wherein the drift region has a drift region doping impurity concentration and the drain region has a drain region doping impurity; and wherein the drift region doping impurity concentration is lower than the drain region doping impurity concentration.
8. The semiconductor device of claim 3 , further comprising an isolation insulating film in the drift region between the drain region and the first well region.
9. The semiconductor device of claim 8 , wherein the second gate portion extends onto the isolation insulating film.
10. The semiconductor device of claim 3 , further comprising a silicon-germanium layer between the first well region and the gate insulating film,
wherein the silicon-germanium layer does not extend over at least a part of the drift region.
11. The semiconductor device of claim 1 , wherein the first gate portion overlaps the first well region and the second gate portion overlaps the drift region.
12. The semiconductor device of claim 11 , wherein the first gate portion extends onto the drift region.
13. The semiconductor device of claim 11 , wherein the second gate portion extends onto the first gate portion.
14. The semiconductor device of claim 1 , wherein the first and second gate portions each comprise one or more metal materials selected from the group consisting of TiN, TaC, TaN, TaSiN, NiSi, Pt and TaCN; and optionally further comprises one or more elements selected from the group consisting of Tb, Er, Yb and Sc.
15. The semiconductor device of claim 1 , wherein the first gate portion comprises one or more metal materials selected from the group consisting of TiN, TaC, TaN, TaSiN, NiSi, Pt and TaCN; and optionally further comprises one or more elements selected from the group consisting of Tb, Er, Yb and Sc.
16. The semiconductor device of claim 1 , wherein the second gate portion comprises one or more metal materials selected from the group consisting of TiN, TaC, TaN, TaSiN, NiSi, Pt and TaCN; and optionally further comprises one or more elements selected from the group consisting of Pt, Ni and Ir.
17. The semiconductor device of claim 1 , wherein the gate insulating film comprises a metal oxide film selected from the group consisting of an aluminum oxide film, a hafnium oxide film, and a metal-semiconductor-oxygen compound film.
18. The semiconductor device of claim 17 , wherein the metal-semiconductor-oxygen compound film is a hafnium-silicon-oxygen-nitrogen compound film.
19. The semiconductor device of claim. 1 , further comprising a first well region disposed adjacent to the source region,
wherein the gate insulating film comprises a first region overlapping the first well region, and a second region in a part of the gate insulating film overlapping the drift region,
wherein the impurity region is included in the first region and the second region.
20. A semiconductor device comprising:
a source region and a drain region disposed in a substrate;
a drift region disposed adjacent to the drain region;
a gate insulating film disposed on the substrate;
an impurity region including lanthanum (La) disposed in the gate insulating film, wherein the impurity region overlaps the drift region; and
a gate electrode disposed on the gate insulating film,
wherein the gate electrode comprises a first gate portion adjacent to the source region and a second gate portion adjacent to the drain region, wherein the first gate portion overlaps the drift region, and
wherein the first gate portion and second gate portion each have different work functions, and wherein the impurity region including lanthanum (La) is included in a first region of the gate insulating film contacting the first gate portion, and not included in a second region of the gate insulating film contacting the second gate portion.
21. The semiconductor device of claim 20 , wherein the first gate portion includes lanthanum (La).