Bonding head with a heatable and coolable suction member
A bonding head for mounting semiconductor chips on a substrate comprises a bonding head body and a suction member formed of a single piece. The elements necessary for heating, cooling and monitoring the temperature of the suction member are all integrated into the suction member, so that neither the heating nor the cooling elements are separated from the semiconductor chip by a surface preventing the heat transfer. The bonding head body contains only the elements necessary for supplying the suction member with electrical power and with the cooling medium.
1. A bonding head, comprising
a bonding head body, and
a flat suction member consisting of a single piece of sintered ceramic material and having a bottom side and an upper side which are opposite of each other,
wherein in the suction member:
the bottom side is formed with at least one recess,
one or more cooling channels are provided beneath the upper side, which cooling channels comprise an inlet and an outlet,
an electrical resistance heating is arranged beneath or above the cooling channels, and
a temperature sensor is integrated, wherein the electrical resistance heating is connected to first contact areas and the temperature sensor to second contact areas;
wherein the bottom side of the bonding head body or the upper side of the suction member comprises one or more recesses, and wherein the bonding head body comprises one or more first channels which opens or open into the one or more recesses and can be supplied with vacuum for sucking up the suction member;
wherein the bonding head body and the suction member comprise at least one second channel which opens into the at least one recess in the bottom side of the suction member and can be supplied with vacuum for sucking up the semiconductor chip;
wherein the bonding head body comprises one or more third channels which is or are in communicating connection with the inlets of the cooling channels, and one or more fourth channels which is or are in communicating connection with the outlets of the cooling channels; and
wherein contact elements are attached to the bonding head body, which come into contact with the first contact areas or the second contact areas when the suction member is sucked up, so that the suction member can be heated by the electrical resistance heating, can be cooled by supplying a cooling medium through the third channel or channels and discharging the cooling medium through the fourth channel or channels, and so that the temperature measured by the temperature sensor can be transmitted to a control unit.
2. The bonding head of claim 1 , wherein the fourth channel or channels extends or extend in a direction arranged obliquely with respect to the bottom side of the suction member and open into the ambient environment, so that an outlet opening of the fourth channel or channels is or are further remote from the bottom side of the suction member than the inlet opening of the fourth channel or channels.
3. The bonding head of claim 1 , wherein the cooling channels, the third channel or channels and the fourth channel or channels belong to a closed circuit.
4. The bonding head of claim 1 , wherein the cooling channels are arranged in a single plane extending parallel to the upper side of the suction member.
5. The bonding head of claim 2 , wherein the cooling channels are arranged in a single plane extending parallel to the upper side of the suction member.
6. The bonding head of claim 3 , wherein the cooling channels are arranged in a single plane extending parallel to the upper side of the suction member.
7. The bonding head of claim 1 , wherein the contact elements are resiliently mounted on the bonding head body.
8. The bonding head of claim 2 , wherein the contact elements are resiliently mounted on the bonding head body.
9. The bonding head of claim 3 , wherein the contact elements are resiliently mounted on the bonding head body.
10. The bonding head of claim 4 , wherein the contact elements are resiliently mounted on the bonding head body.
11. The bonding head of claim 5 , wherein the contact elements are resiliently mounted on the bonding head body.
12. The bonding head of claim 6 , wherein the contact elements are resiliently mounted on the bonding head body.