Wafer mount device and manufacturing method thereof
An adhesive layer that bonds the back surface of a plate capable of attracting a wafer and the front surface of a cooling plate together that includes a main adhesive portion, which is made of a hardened matter of a fluid adhesive, and an outer peripheral adhesive portion, gas-supply-hole adhesive portions, lift-pin-hole adhesive portions, and terminal-hole adhesive portions made of a double-faced tape. The tape portions bond the outer peripheral edge on the back surface of the plate and the outer peripheral edge on the front surface of the cooling plate together, and the outer peripheral edges of the holes on the back surface of the plate and the outer peripheral edges of these holes on the front surface of the cooling plate together.
1. A manufacturing method of a wafer mount device, the method comprising:
(a) a step of preparing a disk-shaped ceramic plate including an electrostatic chuck electrode, and a disk-shaped metal cooling plate having an injection hole and a through hole penetrating through the cooling plate in a thickness direction;
(b) a step of, after the step (a), bonding an outer peripheral edge on a back surface of the plate and an outer peripheral edge on a front surface of the cooling plate together by a double-faced tape, bonding the back surface of the plate and an outer peripheral edge of the through hole on the front surface of the cooling plate together by a double-faced tape, and hence providing a temporary bonded member;
(c) a step of, after the step (b), injecting a fluid adhesive into a space of the temporary bonded member through the injection hole, the space being surrounded by the back surface of the plate, the front surface of the cooling plate, and the double-faced tapes; and
(d) a step of, after the step (c), hardening the fluid adhesive.
2. The manufacturing method of the wafer mount device according to claim 1 ,
wherein, in the step (b), a path is provided, the path communicating with an inner peripheral side and an outer peripheral side of the double-faced tape that bonds the outer peripheral edge on the back surface of the plate and the outer peripheral edge on the front surface of the cooling plate together, and
wherein, in the step (c), the fluid adhesive is injected into the space through the injection hole such that the air is discharged through the path as the fluid adhesive is injected and that the path is closed with the fluid adhesive last.
3. The manufacturing method of the wafer mount device according to claim 2 ,
wherein the injection hole is located at a position deviated from a center axis of the cooling plate, and
wherein, in the step (b), the path is provided at a position opposite to the injection hole with respect to the center axis of the cooling plate.
4. The manufacturing method of the wafer mount device according to claim 2 ,
wherein, in the step (c), after the path is closed with the fluid adhesive, the path is closed with a double-faced tape from outside.
5. The manufacturing method of the wafer mount device according to claim 1 ,
wherein, in the step (d), after the fluid adhesive is injected into the space in the step (c), the temporary bonded member is left until an inner pressure of the fluid adhesive in the space is released, and then the fluid adhesive is hardened.