Thermoelectric device and method for fabricating the same
A thermoelectric device is provided. The thermoelectric device includes first and second electrodes, a first leg, a second leg, and a common electrode. The first leg is disposed on the first electrode and includes one or more first semiconductor pattern and one or more first barrier patterns. The second leg is disposed on the second electrode and includes one or more second semiconductor pattern and one or more second barrier patterns. The common electrode is disposed on the first leg and the second leg. Herein, the first barrier pattern has a lower thermal conductivity than the first semiconductor pattern, and the second barrier pattern has a lower thermal conductivity than the second semiconductor pattern. The first/second barrier pattern has a higher electric conductivity than the first/second semiconductor pattern. The first/second barrier pattern forms an ohmic contact with the first/second semiconductor pattern.
1. A thermoelectric device comprising:
first and second electrodes;
a first leg coupled to the first electrode and including two or more first semiconductor patterns and one or more first barrier patterns;
a second leg coupled to the second electrode and including two or more second semiconductor patterns and one or more second barrier patterns; and
a common electrode coupled to the first leg and the second leg,
wherein the first barrier pattern has a lower thermal conductivity and a higher electric conductivity than the first semiconductor patterns,
wherein the second barrier pattern has a lower thermal conductivity and a higher electric conductivity than the second semiconductor patterns,
wherein the first semiconductor patterns are separated from each other by the first barrier pattern, and the second semiconductor patterns are separated from each other by the second barrier pattern,
wherein the first barrier pattern and the second barrier pattern each comprise one or more selected from the group consisting of a Si-metal alloy, a Ge-metal alloy, and a Si—Ge-metal alloy, and
wherein the first barrier pattern forms an ohmic contact with the first semiconductor patterns, and the second barrier pattern forms an ohmic contact with the second semiconductor patterns.
2. The thermoelectric device of claim 1 , wherein the first semiconductor patterns are first conductivity type semiconductor patterns, and the second semiconductor patterns are second conductivity type semiconductor patterns.
3. The thermoelectric device of claim 1 , wherein the first semiconductor patterns and the second semiconductor patterns each comprise silicon (Si) or germanium (Ge).
4. The thermoelectric device of claim 1 , wherein the metal of the Si-metal alloy, the Ge-metal alloy, and the Si—Ge-metal alloy comprises one or more selected from the group consisting of erbium (Er), europium (Eu), samarium (Sm), platinum (Pt), cobalt (Co), nickel (Ni), and ytterbium (Yb).
5. The thermoelectric device of claim 1 , wherein the common electrode, the first electrode, and the second electrode each comprise silicon (Si) or germanium (Ge).
6. The thermoelectric device of claim 1 , wherein the common electrode, the first electrode, and the second electrode each comprise one or more selected from the group consisting of aluminum (Al), copper (Cu), tungsten (W), titanium (Ti), silver (Ag), gold (Au), platinum (Pt), nickel (Ni), molybdenum (Mo), tantalum (Ta), iridium (Ir), ruthenium (Ru), zinc (Zn), stannum (Sn), chrome (Cr) and indium (In).
7. The thermoelectric device of claim 1 , wherein the first leg and the second leg are each provided in plurality.
8. The thermoelectric device of claim 1 , the device further comprising a capping pattern over a sidewall of any of the first and second legs.
9. A thermoelectric device array comprising:
first and second thermoelectric devices each including
first and second electrodes;
a first leg coupled to the first electrode and including two or more first semiconductor patterns and one or more first barrier patterns;
a second leg coupled to the second electrode and including two or more second semiconductor patterns and one or more second barrier patterns; and
a common electrode coupled to the first leg and the second leg,
wherein the first electrode of each thermoelectric device is electrically connected to the second electrode of an adjacent thermoelectric device, and an insulating material is provided between the common electrodes of the thermoelectric devices,
wherein the first barrier pattern has a lower thermal conductivity and a higher electric conductivity than the first semiconductor patterns,
wherein the second barrier pattern has a lower thermal conductivity and a higher electric conductivity than the second semiconductor patterns,
wherein the first semiconductor patterns of the first thermoelectric device are separated from each other by the first barrier pattern, and the second semiconductor patterns of the first thermoelectric device are separated from each other by the second barrier pattern,
wherein the first barrier pattern and the second barrier pattern each comprise one or more selected from the group consisting of a Si-metal alloy, a Ge-metal alloy, and a Si—Ge-metal alloy, and
wherein the first barrier pattern forms an ohmic contact with the first semiconductor patterns, and the second barrier pattern forms an ohmic contact with the second semiconductor patterns.
10. The thermoelectric device array of claim 9 , wherein the first semiconductor patterns are first conductivity type semiconductor patterns, and the second semiconductor patterns are second conductivity type semiconductor patterns.
11. The thermoelectric device array of claim 9 , wherein the first semiconductor patterns and the second semiconductor patterns each comprise silicon (Si) or germanium (Ge).
12. The thermoelectric device array of claim 9 , wherein the metal of the Si-metal alloy, the Ge-metal alloy, and the Si—Ge-metal alloy comprises one or more selected from the group consisting of erbium (Er), europium (Eu), samarium (Sm), platinum (Pt), cobalt (Co), nickel (Ni), and ytterbium (Yb).
13. The thermoelectric device array of claim 9 , wherein the common electrode, the first electrode, and the second electrode each comprise silicon (Si) or germanium (Ge).
14. The thermoelectric array device of claim 9 , wherein the common electrode, the first electrode, and the second electrode each comprise one or more selected from the group consisting of aluminum (Al), copper (Cu), tungsten (W), titanium (Ti), silver (Ag), gold (Au), platinum (Pt), nickel (Ni), molybdenum (Mo), tantalum (Ta), iridium (Ir), ruthenium (Ru), zinc (Zn), stannum (Sn), chrome (Cr) and indium (In).
15. The thermoelectric device array of claim 9 , the device further comprising a capping pattern over a sidewall of any of the first and second legs.
16. A thermoelectric device comprising:
first and second electrodes;
a first leg coupled to the first electrode and including two or more first semiconductor patterns and one or more first barrier patterns;
a second leg coupled to the second electrode and including two or more second semiconductor patterns and one or more second barrier patterns; and
a common electrode coupled to the first leg and the second leg,
wherein the first barrier pattern has a lower thermal conductivity and a higher electric conductivity than the first semiconductor patterns,
wherein the second barrier pattern has a lower thermal conductivity and a higher electric conductivity than the second semiconductor patterns,
wherein the first semiconductor patterns are separated from each other by the first barrier pattern, and the second semiconductor patterns are separated from each other by the second barrier pattern,
wherein each of the first barrier pattern and the second barrier pattern is a metal silicide layer, and
wherein the first barrier pattern forms an ohmic contact with the first semiconductor patterns, and the second barrier pattern forms an ohmic contact with the second semiconductor patterns.
17. The thermoelectric device of claim 16 , wherein the first semiconductor patterns are first conductivity type semiconductor patterns, and the second semiconductor patterns are second conductivity type semiconductor patterns.
18. The thermoelectric device of claim 16 , wherein the first semiconductor patterns and the second semiconductor patterns each comprise silicon (Si) or germanium (Ge).
19. The thermoelectric device of claim 16 , wherein the metal of the Si-metal alloy, the Ge-metal alloy, and the Si—Ge-metal alloy comprises one or more selected from the group consisting of erbium (Er), europium (Eu), samarium (Sm), platinum (Pt), cobalt (Co), nickel (Ni), and ytterbium (Yb).