Semiconductor device having insulating layer formed through oxidization of electrode
In a method for fabricating a semiconductor device, a conductive layer is formed on a substrate, where the substrate has a bottom layer formed thereon. A magnetic tunnel junction layer is formed on the conductive layer. The magnetic tunnel junction layer is patterned using an etching gas containing oxygen. An insulating layer is formed by oxidizing the conductive layer exposed outside the patterned magnetic tunnel junction layer using the etching gas.
1. A semiconductor device, comprising:
an interlayer insulating layer;
a contact plug and a first electrode that are each stacked in a hole penetrating the interlayer insulating layer;
a second electrode formed on the first electrode;
a magnetic tunnel junction element formed on the second electrode;
a third electrode formed on the magnetic tunnel junction element; and
an insulating layer formed on a portion of the interlayer insulating layer excluding the hole penetrating the interlayer insulating layer by oxidizing the second electrode that is exposed at both sides of the magnetic tunnel junction element,
wherein an etching damage of the third electrode is reduced by the oxidizing of the second electrode instead of an etching of the second electrode, and
wherein the insulating layer and the second electrode are disposed in a same layer.
2. The semiconductor device of claim 1 , wherein the insulating layer functions to insulate adjacent first and second electrodes or the magnetic tunnel junction element.
3. The semiconductor device of claim 1 , wherein a magnetic tunnel junction pattern is formed by patterning the magnetic tunnel junction element using the metal oxidation layer as an etch barrier.
4. The semiconductor device of claim 3 , wherein the first contact plug contacts a source region and a drain region formed by burying a conductive layer in the hole.
5. The semiconductor device of claim 4 , wherein the magnetic tunnel junction element is patterned using an etching gas and the conductive layer is not patterned using the etching gas.