Yaw-rate sensor
A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.
1. A yaw-rate sensor, comprising:
a first Coriolis element;
a second Coriolis element;
a substrate having a main plane of extension;
a first drive element to drive the first Coriolis element in parallel to a second axis;
a second drive element to drive the second Coriolis element in parallel to the second axis, the first drive element and the second drive element being mechanically coupled to each other via a drive coupling element; and
a detection element to detect deflections of the first Coriolis element and the second Coriolis element in parallel to a first axis due to a Coriolis force, the first axis being situated perpendicularly to the second axis, the first axis and the second axis being situated in parallel to the main plane of extension;
wherein the drive coupling element is mechanically coupled directly to the substrate.
2. The yaw-rate sensor as recited in claim 1 , wherein the drive coupling element has a first drive coupling subelement and a second drive coupling subelement.
3. The yaw-rate sensor as recited in claim 2 , wherein at least one of the first drive coupling subelement and the second drive coupling subelement has a bar structure.
4. The yaw-rate sensor as recited in claim 1 , wherein the drive coupling element is softer regarding a rotation about a third axis than regarding a rotation about the first axis, the third axis being situated perpendicularly to the main plane of extension, the drive coupling element being more rigid along the second axis than along the first axis.
5. The yaw-rate sensor as recited in claim 1 , wherein the detection element has a first detection subelement and a second detection subelement, the first detection subelement and the second detection subelement being mechanically coupled to each other via a detection coupling element.
6. The yaw-rate sensor as recited in claim 5 , wherein the detection coupling element is mechanically coupled to the substrate.
7. The yaw-rate sensor as recited in claim 5 , wherein the detection coupling element has at least one first detection coupling subelement and one second detection coupling subelement, at least one of the first detection coupling subelement and the second detection coupling subelement having a bar structure.
8. The yaw-rate sensor as recited in claim 5 , wherein the detection coupling element is softer regarding a rotation about a third axis than regarding a rotation about the first axis, the detection coupling element being more rigid along the second axis than along the first axis.
9. A method for operating a yaw-rate sensor having a first Coriolis element, a second Coriolis element, and a substrate having a main plane of extension, the method comprising:
exciting the first Coriolis element by a first drive element to a first oscillation in parallel to a second axis;
exciting the second Coriolis element by a second drive element to a second oscillation in parallel to the second axis;
detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis by a detection element, the second axis being situated perpendicularly to the first axis, the first axis and the second axis being situated in parallel to the main plane of extension; and
mechanically coupling the first oscillation and the second oscillation to each other via a drive coupling element;
wherein the drive coupling element is mechanically coupled directly to the substrate.